A relative-pressure sensor determines the pressure of a medium in relation to an atmospheric pressure. The sensor includes a housing having a measuring element located in the housing, wherein the pressure to be measured acts upon an outer surface of the measuring element. The surface is in contact with the medium. The sensor also includes a reference-pressure supply, which supplies an inner surface of the measuring element with atmospheric pressure in the form of ambient air, and an evaluation unit, which determines the pressure of the medium from a variable determined using the measuring element. A drying chamber takes-up atmospheric humidity from the ambient air that is supplied via the reference-pressure supply. The drying chamber has a drying module comprising a container and a humidity-adsorbing material that is completely surrounded by the container.

A method for producing a wafer connection between a first and a second wafer. The method includes providing a first and second material for forming a eutectic alloy, providing a first wafer having a receiving structure for a die structure, filling the receiving structure with the first material, providing a second wafer having a die structure, the second material being situated on the die structure, providing a stop structure on the first and/or second wafer, so that when the two wafers are joined, a defined stop is provided, heating the first and second material at least to the eutectic temperature of the eutectic alloy, joining the first and second wafer so that the die structure is at least partly introduced into the receiving structure, the stop structure, the receiving structure, the die structure.

A sensor arrangement for measuring the pressure and temperature of a fluid includes a housing, a pressure sensor element, and a temperature sensor case. The housing includes a passage and a fluid opening, the passage and the fluid opening being in fluid communication. The pressure sensor element is connected to the housing, the pressure sensor element being in fluid communication with the passage. The temperature sensor case includes at least one temperature sensor element, the temperature sensor case being at least partially arranged in the passage. The sensor arrangement further includes an attachment element, wherein the attachment element attaches the temperature sensor case to the passage. The sensor arrangement further includes a fluid channel extending at least in part between the housing and the temperature sensor case, the fluid channel passing the attachment element and being in fluid communication with the fluid opening and the pressure sensor element.

A connector for coupling a single-use container to a measurement instrument includes a connector region. The connector includes a deflectable diaphragm sealed to the connector region and configured to contact a media sample.

The design and manufacture method of a pressure sensor utilizing thermal field sensing with a thermal isolated membrane of a diaphragm structure is disclosed in the present invention. This device is made with silicon micromachining (a.k.a. MEMS, Micro Electro Mechanical Systems) process for applications of pressure measurement with large dynamic range, high accuracy and high stability during temperature variation. This device is applicable for all types of pressure metrology. The said thermal field pressure sensing device operates with thermistors on a membrane of the diaphragm structure made of silicon nitride with a heat isolation cavity underneath or a single side thermal isolated silicon nitride membrane with a reference cavity. This device can be seamlessly integrated with a thermal flow sensor with the same process.

An in-line process fluid pressure transmitter is provided. The transmitter includes a process fluid connector configured to couple to a source of process fluid. A plug is coupled to the process fluid connector and has a passageway configured to convey fluid to a distal end of the plug. A pressure sensor subassembly is coupled to the plug at a weld. The pressure sensor subassembly has a pressure sensor operably coupled to the distal end of the passageway such that the pressure sensor reacts to process fluid pressure. The plug includes a sidewall encircling the weld. Transmitter electronics are coupled to the pressure sensor and configured to measure an electrical characteristic of the pressure sensor and provide a process fluid pressure value based on the measured electrical characteristic.

In accordance with an embodiment, a MEMS sensor includes a MEMS arrangement having a movable electrode and a stator electrode arranged opposite the movable electrode. The MEMS sensor includes a first bias voltage source, which is connected to the stator electrode and which is configured to apply a first bias voltage to the stator electrode. The MEMS sensor further includes a common-mode read-out circuit connected to the stator electrode by a capacitive coupling and comprising a second bias voltage source, which is configured to apply a second bias voltage to a side of the capacitive coupling that faces away from the stator electrode.

A connection adapter for connecting a process chamber to a measuring system, in particular to a pressure, density or temperature measuring system, which includes at least three ports, having a process port, the process port being connected or connectable to the process chamber, a measuring port, the measuring system being connected or connectable to the measuring port, and an access port, which includes a self-sealing coupling. The connection adapter, furthermore includes a line system, having lines and at least one closable shutoff device. The line system connecting the process port to the measuring port and the access port, the connection between the process port and the measuring port being blockable gas-tight with the aid of the shutoff device, and the access port being connected or connectable to the measuring port via the line system. A measuring apparatus having a connection adapter is also provided.

A sensor and/or sound detection device having a sensing device having a sensitive surface, an access channel being designed in such a way that air and/or a gas is transferable through the open access channel between a spatial surroundings of the sensor/detection device and the sensitive surface, and an at least partially water-impermeable membrane having respectively an inner side of the membrane facing the associated access channel being designed in such a way that a contact surface on the respective inner side of the respective membrane is pressed against an associated membrane contact surface on the associated access channel in such a way that the associated access channel is sealed in a liquid-tight manner when an outer side of the respective membrane or a covering layer on the respective outer side of the membrane is wetted with at least a minimum quantity of liquid and the respective membrane is deformed.

A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.