G01L9/0041

Pressure sensor configured to detect pressure of fluid to be measured that embrittles material

A pressure sensor includes a pressure sensor element, a joint provided to a target member, and an attachment member that is fitted into the joint through the connection section and connected to the target member. Each of the pressure sensor element and the joint is formed of a material that is not embrittled upon being in contact with a fluid to be measured that embrittles a material, and more rigid than the attachment member. The connection section is subjected to a plastic deformation connection (metal flow). An expensive hydrogen embrittlement resistant material is used for the pressure sensor element and the joint that are brought into contact with the fluid to be measured, and an inexpensive material is used for the attachment member that is not brought into contact with the fluid to be measured, thereby reducing the production cost of the pressure sensor.

SEMICONDUCTOR MANUFACTURING METHOD
20180346319 · 2018-12-06 ·

A method of manufacturing a semiconductor structure includes receiving a substrate, receiving a heater, receiving an electrode, and receiving a sensing material. The substrate have a first surface, a second surface opposite to the first surface and a plurality of vias extending from the second surface toward the first surface and filled with a conductive or semiconductive material and a first oxide layer, the first oxide layer surrounding the conductive or semiconductive material in the plurality of vias, and a second oxide layer disposed over the first surface and the second surface. The heater is disposed within a membrane over the first surface of the substrate and electrically connected with the substrate. The electrode is over the heater and the membrane; and the sensing material covers a portion of the electrode.

Physical quantity measuring device including a sensor module and a joint for locking the sensor module

A physical quantity measuring device includes: a sensor module provided with a diaphragm; a joint to which the sensor module is attached, the joint including a pressure inlet for delivering fluid to be measured to the sensor module. The joint is made of a synthetic resin and includes a joint body and an elastically deformable claw provided to the joint body and configured to lock the sensor module. Since the claw keeps the sensor module to be held by virtue of the elastic force of the claw, a further attachment process such as welding for attaching the sensor module to the joint is unnecessary. Since the joint body and the claw are integrally made of synthetic resin, it is not necessary to separately manufacture the joint body and the claw.

Method for inspecting pressure pulse wave sensor and method for manufacturing pressure pulse wave sensor

A method for inspecting a pressure pulse wave sensor is provided. The sensor chip includes a recess which is recessed in a direction perpendicular to the pressure-sensitive face, and the pressure-sensitive element array is formed in a portion of the sensor chip whose thickness is reduced in the direction due to the recess. The method includes: bonding and fixing the sensor chip onto the substrate so that the recess communicates with atmospheric air through only the through hole of the substrate; connecting a substrate-side terminal portion of the substrate and the chip-side terminal portion through an electrically conductive member; and performing characteristic evaluation on the sensor chip based on a signal outputted from the substrate-side terminal portion in a state in which air is sucked through the through hole of the substrate to thereby apply negative pressure to the pressure-sensitive face.

Amorphous quartz pressure transducer
10119874 · 2018-11-06 · ·

A pressure transducer comprising a flexible member made of amorphous quartz and a crystalline quartz sensor are coupled together without an adhesive material. Instead, the amorphous quartz and the crystalline quartz sensor are coupled together at the molecular level. In some embodiments, the crystalline quartz sensor remains in compression or tension during the entire operating range of the pressure transducer. In one embodiment, the crystalline quartz sensor is pre-stressed in either compression or tension when the pressure transducer is exposed to atmospheric pressure. In one embodiment, pressure transducer is located in pressure stabilizing system.

Ceramic sensor module including diaphragm and cylindrical portion integrated with the diaphragm

A physical quantity measuring sensor includes: a joint having a projection; a ceramic sensor module including a diaphragm and a cylindrical portion integrated with the diaphragm and provided to the projection; and an O-ring interposed between a sensor-module flat portion extending in a direction orthogonal to an axial direction of the cylindrical portion and a joint flat portion extending in a direction orthogonal to an axial direction of the projection.

SENSOR ELEMENT FOR RECORDING AT LEAST ONE PROPERTY OF A FLUID MEDIUM
20180292283 · 2018-10-11 ·

A sensor element for recording at least one property of a fluid medium. The sensor element includes at least one housing that forms at least one wall of at least one flow channel that can be traversed by the flow of the fluid medium. In the wall, at least one pressure tap branches off from the flow channel. At least one pressure sensor for recording a pressure of the fluid medium is configured in the pressure tap. Provided in the wall is at least one outflow contour that at least partially surrounds an orifice of the pressure tap and is adapted for diverting impurities flowing along the wall away from the orifice of the pressure tap.

OIL PRESSURE SENSOR ATTACHMENT STRUCTURE
20180283970 · 2018-10-04 ·

According to one aspect of the present invention, there is provided an oil pressure sensor attachment structure including: the oil path body; the sensor case; and a fixing member which fixes the sensor case to the oil path body. The sensor case has a columnar portion which is disposed along a central axis extending in an up and down direction, and a flange portion which protrudes from the columnar portion to an outside in a radial direction. The fixing member has a fixing portion which comes into contact with the oil path body and is fixed thereto, and a pressing portion which comes into contact with the upper surface of the flange portion and presses the flanges portion against the oil path body. The fixing portion and the pressing portion are disposed with an interval therebetween.

Pressure sensor manifold with increased photocurable resistance

A pressure sensor manifold is provided that resolves issues caused by accumulated particles and bubbles to improve print head performance. The pressure sensor manifold includes a fluid inlet, a fluid outlet, and a dome-shape cavity connecting with both the fluid inlet and the fluid outlet. The fluid inlet has a first interior cross-section, and the fluid outlet has a second interior cross-section. The dome-shape cavity has an apex. A line that is tangential to the apex passes through a plurality of points on both the first interior cross-section of the fluid inlet and the second interior cross-section of the fluid outlet.

Pressure sensor

A pressure sensor according to an embodiment includes: a support member; a membrane supported by the support and having flexibility; and a strain detection element formed on the membrane. The strain detection element includes a first magnetic layer formed on the membrane and having a magnetization, a second magnetic layer having a magnetization, and an intermediate layer formed between the first magnetic layer and the second magnetic layer. A direction of at least one of the magnetization of the first magnetic layer and the magnetization of the second magnetic layer changes relatively to that of the other depending on a strain of the membrane. Moreover, the membrane includes an oxide layer that includes aluminum.