A differential pressure sensor is used for measuring or identifying a pressure difference, for example to determine a movement or speed of fluid in a fluid conduit or printer re-circulation conduit. The differential pressure sensor determines the difference between an air pressure and a fluid pressure, wherein the fluid is moving in a flow channel. The flow channel includes a surface conveying a fluid between a first port and second port. An opening in the surface of the flow channel provides a fluid communication between the differential pressure sensor and fluid. Moreover, the sensor is arranged in air communication with the pressure box, such as to allow the differential pressure sensor to identify the pressure difference between the air pressure in the pressure box and the fluid pressure in the flow channel.

A pressure element for monitoring a fluid being applied to the pressure element, wherein the pressure element is configured to close an electrical circuit, as a result of a change in pressure which the fluid exerts on the pressure element, independently of an absolute value of the pressure, where the fluid preferably flows through a pipeline.

An apparatus in the field of optics technology, can include a reflector, a reflector substrate, and an extinction component. The reflector can be mounted on the reflector substrate. The extinction component can be arranged on a front surface of the reflector substrate. The reflector can be configured to reflect incident light signals. The extinction component can be configured to reduce the scattered light produced by the incident light signal on the reflector substrate. An optical scanning device (for example, lidar) having such features may greatly reduce the scattered light inside the lidar, reduce the detection blind area caused by the stray light, and greatly improve the receiving and detecting capabilities of the lidar.

To manage the effect of disturbance on the reliability of a pressure measurement value, a pressure sensor includes a cylindrical housing in which a through-hole is formed, a diaphragm that has a peripheral edge portion fixed to the housing to block the through-hole and has a first surface in contact with a fluid to be measured, a strain sensor, provided on a second surface on the opposite side of the first surface of the diaphragm, that detects the deformation of the diaphragm, a dummy diaphragm that has a peripheral edge portion fixed to the housing and does not make contact with the fluid, and another strain sensor, provided on a first surface or a second surface of the dummy diaphragm, that detects the deformation of the dummy diaphragm.

To correct for effects of disturbance on a pressure measurement value, a pressure sensor includes a cylindrical housing having a through-hole, a diaphragm having peripheral edge portions fixed to the housing to block the through-hole and a first surface in contact with a fluid to be measured, first strain sensor on a surface on an opposite side of the diaphragm's first surface for detecting deformation of the diaphragm, a dummy diaphragm having peripheral edge portions fixed to the housing and not making contact with the fluid, second strain sensor on a surface of the dummy diaphragm for detecting deformation of the dummy diaphragm, a correction unit for correcting output signal of the first strain sensor to eliminate effects of disturbance based on output signal of the second strain sensor, and a pressure calculation unit for converting the signal corrected by the correction unit into the fluid's pressure.

To provide a pressure sensor that has high pressure resistance performance, small measurement error by suppressing hysteresis with respect to pressure, and high sensitivity and high productivity, a pressure sensor includes a diaphragm unit with a first main surface that receives a measurement target fluid's pressure and a second main surface located on the opposite side of this first main surface, a housing, and a sensing unit that outputs the diaphragm unit's deformation as an electric signal, in which at least part of the diaphragm unit has a multi-layer structure in which a plurality of thin plate members are stacked, and the plurality of thin plate members are deformed independently of each other while at least part of the plurality of thin plate members is in press-contact to each other in a pressure receiving state in which the measurement target fluid's pressure is applied to the first main surface.

A method for manufacturing a sensor. The sensor includes a sensing element and a housing, the housing including an interior space, which is accessible through a housing opening, and the sensing element being situated in the interior space and being designed to detect a property and/or a composition of an ambient medium of the sensor. The method includes filling the interior space with a protective medium through the housing opening, the protective medium being designed to transfer the property and/or the composition of the ambient medium to the sensing element; fixing a preferably flexible diaphragm at or in the housing opening preferably for sealing the housing opening, the diaphragm including at least one diaphragm opening; and sealing the at least one diaphragm opening. A sensor, which is manufactured according to this method, is also described.

Provided is a particle trapping apparatus for preventing an error of a pressure measurement. A particle trapping apparatus for preventing an error of a pressure measurement includes a pressure-measuring means; a measuring pipe for connecting the pressure-measuring means to a processing chamber; and a trapping means for capturing particles in a gas flowing through the measuring pipe, wherein the trapping means is coupled to the measuring pipe or is a portion of the measuring pipe.

A physical quantity measuring device includes a sensor module; a joint attached with the sensor module; a connector configured to be connected to a first or a second cylindrical case and the joint; a circuit substrate attached with an electronic circuit configured to receive a signal detected by the sensor module; and a holder holding the circuit substrate. The holder can be housed in the first cylindrical case in a first posture where a first end is engaged with a first connector and a second end is in contact with a first cover, or in a second cylindrical case in a second posture where the first end is engaged with a second cover and the second end is in contact with a second connector. The holder has an engaging projection engageable with a first engagement groove provided to the first connector and a second engagement groove provided to the second cover.

Improvements in thin film sensors are disclosed. These can be used for aircraft applications. Dielectric isolation washers can be provided between a pressure sensor and an exterior metal housing of a sensor assembly. In this manner, high voltage inputs from a lightning strike or other source that reach the sensor housing are not transmitted to the sensor. Dielectric washers, insulators, and potting compounds can thus isolate a metal thin film pressure sensor from adjacent metal components (e.g., using non-conducting insulating materials like Torlon, zirconia and nylon). Besides their high dielectric strength, these materials exhibit compressive strength and resistance to wear, creep and corrosion. Desirable thicknesses for these components are provided. The described thin film pressure sensor embodiments can attain a dielectric rating of 1500 VAC.