G01B9/02015

Self-Configuration and Error Correction in Linear Photonic Circuits
20220397383 · 2022-12-15 ·

Component errors prevent linear photonic circuits from being scaled to large sizes. These errors can be compensated by programming the components in an order corresponding to nulling operations on a target matrix X through Givens rotations X.fwdarw.T.sup.†X, X.fwdarw.XT.sup.†. Nulling is implemented on hardware through measurements with feedback, in a way that builds up the target matrix even in the presence of hardware errors. This programming works with unknown errors and without internal sources or detectors in the circuit. Modifying the photonic circuit architecture can reduce the effect of errors still further, in some cases even rendering the hardware asymptotically perfect in the large-size limit. These modifications include adding a third directional coupler or crossing after each Mach-Zehnder interferometer in the circuit and a photonic implementation of the generalized FFT fractal. The configured photonic circuit can be used for machine learning, quantum photonics, prototyping, optical switching/multicast networks, microwave photonics, or signal processing.

Wavelength tracking system, method to calibrate a wavelength tracking system, lithographic apparatus, method to determine an absolute position of a movable object, and interferometer system
11525737 · 2022-12-13 · ·

The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length. The interferometer system comprises: a beam splitter to split a light beam in a first measurement beam and a second measurement beam; at least one optic element to guide the first measurement beam, at least partially, along the first reflection path and the second measurement beam, at least partially, along the second reflection path; a first light sensor arranged at an end of the first reflection path to receive the first measurement beam and to provide a first sensor signal on the basis of the first measurement beam; a second light sensor arranged at an end of the second reflection path to receive the second measurement beam and to provide a second sensor signal on the basis of the second measurement beam; and a processing unit to determine a wavelength or change in wavelength on the basis of the first sensor signal and the second sensor signal.

Electronic speckle pattern interferometer (ESPI) for long-range measurement of displacement of materials within hazardous environments

A digital speckle pattern interferometer (DSPI) is provided for long-range measurement of displacement of materials within a hazardous environments. A test arm of a portion of coherent beam from a laser is aimed at a selected angle to traverse a distance to a test surface. An input collimator has a lens wide enough to receive a reflected beam from the test surface and is focused at a corresponding distance. The reflected beam is combined with a reference beam split from the coherent radiation onto a camera for measuring displacement of the test surface based on an electronic speckle pattern interferometer (ESPI).

NON-CONTACT OPTICAL MEASUREMENT DEVICES AND EXCHANGEABLE OPTICAL PROBES

Disclosed is a non-contact optical measurement device for detecting or measuring different geometric workpiece features based on configurable light-propagation paths of light emitted from a light source and reflected by a workpiece surface for incidence upon a spectral sensor. The light-propagation paths are configurable based on which optical probe is attached to a rotation stage that rotates the probe about an optical axis and in a collimated region.

System and method for stabilization of multi-path optical interferometers

A system and a method for phase extraction of a multi-path interferometer, the method comprising generating a reference signal of a coherence length longer than an arm length difference of the multi-path interferometer; splitting the reference signal into a frequency shifted reference signal and an unshifted reference signal; recombining the frequency shifted reference signal and the unshifted reference signal into a polarization- and frequency-multiplexed reference signal, and feeding the polarization- and frequency-multiplexed reference signal to the multi-path interferometer; detecting frequency shifted and unshifted output signals of the multi-path interferometer; and determining the interferometer phase from the detected signal.

Wavelength Tracking System, Method to Calibrate a Wavelength Tracking System, Lithographic Apparatus, Method to Determine an Absolute Position of a Movable Object, and Interferometer System

The invention provides a wavelength tracking system comprising a wavelength tracking unit and an interferometer system. The wavelength tracking unit has reflection surfaces at stabile positions providing a first reflection path with a first path length and a second reflection path with a second path length. The first path length is substantially larger than the second path length. The interferometer system comprises: a beam splitter to split a light beam in a first measurement beam and a second measurement beam; at least one optic element to guide the first measurement beam, at least partially, along the first reflection path and the second measurement beam, at least partially, along the second reflection path; a first light sensor arranged at an end of the first reflection path to receive the first measurement beam and to provide a first sensor signal on the basis of the first measurement beam; a second light sensor arranged at an end of the second reflection path to receive the second measurement beam and to provide a second sensor signal on the basis of the second measurement beam; and a processing unit to determine a wavelength or change in wavelength on the basis of the first sensor signal and the second sensor signal.

SYSTEM AND METHOD FOR CORRECTING OPTICAL PATH LENGTH MEASUREMENT ERRORS
20220357146 · 2022-11-10 · ·

A system includes a first optical unit that emits light to a measurement target object and receives first interference light incident from the measurement target object, a second optical unit that emits the light to a reference object configured to have a constant optical path length with respect to a temperature fluctuation and receives second interference light incident from the reference object, a spectroscope connected to the first optical unit and the second optical unit and receives the first interference light and the second interference light to be incident, and a control unit connected to the spectroscope, and the control unit calculates a fluctuation rate of a measurement optical path length with respect to a reference optical path length under a predetermined temperature environment on the basis of the optical path length of the reference object calculated on the basis of the second interference light incident on the spectroscope under the predetermined temperature environment, and the reference optical path length of the reference object acquired in advance, and corrects, on the basis of the fluctuation rate, the optical path length of the measurement target object calculated on the basis of the first interference light incident on the spectroscope under the predetermined temperature environment.

Device and method for interferometric measurement of a two or three dimensional translation of an object

Translations of an object in a plurality of different spatial directions are measured using a plurality of interferometers to detect interference with light that has been reflected from a diffusively reflective surface, preferably using diffuse reflection from the same planar surface to measure in each of the different spatial directions. At least the interferometers that measure translation in directions that are not perpendicular to the surface each comprises a single mode fiber and a collimator configured to transmit the outgoing light to the object successively through the single mode fiber and the collimator, and to collect reflection into the single mode fiber with the collimator both along a same beam direction. It has been found that, when reflection of a beam with a beam direction at an oblique angle to a diffusively reflective surface is used, the interference resulting from translation of the object is due substantially only to translation in the beam direction.

Optical coherence tomography receiver

An Optical Coherence Tomography receiver may include prisms, polarizing beam splitters, reflectors, lenses, and a photodetector array arranged in a compact package. Sample and reference beams are combined into an interference beam and split in two. The two resulting interference beams are then split into two polarization sates each. The optical path lengths for both pairs of interference beams with the same polarization state are equal or nearly equal.

Optical coherence tomography receiver

An Optical Coherence Tomography receiver may include prisms, polarizing beam splitters, reflectors, lenses, and a photodetector array arranged in a compact package. Sample and reference beams are combined into an interference beam and split in two. The two resulting interference beams are then split into two polarization sates each. The optical path lengths for both pairs of interference beams with the same polarization state are equal or nearly equal.