Patent classifications
G01J1/429
Extreme ultraviolet light generating apparatus
An extreme ultraviolet light generating apparatus moves a generation position of extreme ultraviolet light based on an instruction from an external device and includes a chamber in which a target fed therein is irradiated with laser light so that the extreme ultraviolet light is generated from the target; a target feeder configured to output and feed the target into the chamber; a condensing mirror configured to condense the laser light on the target fed into the chamber; a stage configured to regulate a position of the target feeder; a manipulator configured to regulate a position of the condensing mirror; and a control unit configured to be able to control at least one of the stage, the manipulator, and a radiation timing of the laser light to the target, in a feedforward method, when the generation position is moved during generation of the extreme ultraviolet light.
Oscillation circuit including an ultraviolet sensor
An ultraviolet-ray (UV) sensor is disclosed. In one embodiment, the UV sensor includes a piezoelectric material, a sensing film arranged on the piezoelectric material and senses ultraviolet rays, an elastic wave input unit arranged on one end of the sensing film on the piezoelectric material and provides the sensing film with an elastic wave generated based on an electrical signal and an elastic wave output unit arranged on the other end of the sensing film on the piezoelectric material and senses a change in frequency of the electrical signal generated based on the provided elastic wave. The UV sensor improves sensitivity of the sensor by enabling the particles having large surface areas due to their characteristics to react with a larger amount of ultraviolet rays. the UV sensor can secure price competitiveness since the UV sensor measures a change in frequency of the elastic wave using zinc oxide (ZnO) nanoparticles.
System and method for controlling temperature of user
Disclosed herein are a system and method for controlling the temperature of a user. The wearable device may include a first temperature measurement unit configured to measure a temperature of a user and a control unit configured to calculate a temperature difference by comparing the temperature measured by the first temperature measurement unit with a previously stored temperature of the user at normal times, provide temperature measurement information to an external device if the calculated temperature difference is more than a reference temperature difference for a predetermined time, and receive service information for controlling the temperature of the user based on the temperature measurement information from the external device.
IMAGING DEVICE FOR ASSESSING SUNSCREEN COVERAGE
A device for assessing sunscreen coverage on a person includes a casing a lens assembly extending from about a front facing surface of the casing and allowing transmissivity to light energy in a wavelength range of about 300 to about 400 nm. A filter is in optical communication with the lens assembly and having a high optical density above about 390 nm and a low optical density below about 390 nm. A sensor is in optical communication with the filter, the sensor having a signal/noise ratio that is greater than about 36 db. A controller is configured for receiving input from a user to control the device. A display screen may be in communication with a controller for displaying an image associated with the filtered light.
Method and system for measuring radiation and temperature exposure of wafers along a fabrication process line
A measurement wafer device for measuring radiation intensity and temperature includes a wafer assembly including one or more cavities. The measurement wafer device further includes a detector assembly. The detector assembly includes one or more light sensors. The detector assembly is further configured to perform a direct or indirect measurement of the intensity of ultraviolet light incident on a surface of the wafer assembly.
Dual color temperature vehicle lamp able to judge driving environment based on invisible light and judging method
A dual color temperature vehicle lamp able to judge a driving environment based on invisible light includes a vehicle lamp body in the form of an LED. The vehicle lamp body includes a light emitting unit capable of performing a conversion of at least two kinds of color temperature light. A front end face of the vehicle lamp body is provided with at least one invisible light emitting source, at least one reflected light receiver, and a partition plate between the invisible light emitting source and the reflected light receiver. The invisible light emitting source is embedded in a recess at a front end of the vehicle lamp body. The vehicle lamp body includes a preamplifier circuit connected with the reflected light receiver, an MCU connected with the preamplifier circuit, and a wireless transceiver module connected with the MCU therein.
Monolithic integration of ultraviolet and infrared radiation detectors and manufacturing process thereof
A semiconductor device for flame detection, including: a semiconductor body having a first conductivity type conductivity, delimited by a front surface and forming a cathode region; an anode region having a second conductivity type conductivity, which extends within the semiconductor body, starting from the front surface, and forms, together with the cathode region, the junction of a photodiode that detect ultraviolet radiation emitted by the flames; a supporting dielectric region; and a sensitive region, which is arranged on the supporting dielectric region and varies its own resistance as a function of the infrared radiation emitted by the flames.
Ultraviolet radiation monitoring apparatus, system having the same, and method thereof
The present application discloses a UV radiation monitoring apparatus, method, and system. The monitoring apparatus includes a case, an authenticator disposed on the case and configured to identify a user, a controller in the case coupled to the authenticator to enable a first mode for an authenticated user, a detector on the case coupled to the controller and configured to measure an intensity of ultraviolet radiation and generate ultraviolet index (UVI) value at the present time, a memory coupled to the controller and configured to store the UVI values over an exposure time added into historical UVI data for the authenticated user, and a display unit to display the UVI value at the present time and the personal health instructions on UV protection for the authenticated user. The monitoring apparatus further is configured to be paired with a mobile terminal for providing updated personal health instructions.
Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamber
A method includes generating light in a light generating chamber, causing a portion of the generated light to pass through a tube having a roughened inner surface, and detecting the portion of the generated light that has passed through the tube using a photodetector. The roughened inner surface of the tube has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. In one example, the method includes outputting a signal from the photodetector to a controller, with the signal corresponding to the detected portion of the generated light. The light generated in the light generating chamber can be extreme ultraviolet (EUV) light. In tests using roughened and non-roughened protection tubes, the roughened tube was found to minimize or essentially eliminate the contribution to EUV energy from grazing incidence reflections off the inner surface of the tube.
Colorimetric radiation dosimetry
A dosimetry device includes a first chamber formed on a substrate with a first decomposable barrier sensitive to radiation and a first chemical component. A second chamber is formed on the substrate in proximity of the first chamber and includes a second decomposable barrier sensitive to radiation and a second chemical component. Upon a radiation event, decomposition of the first and second barriers of the first and second chambers permits a mixing of the first and second chemical components to cause a visible change of the dosimetry device.