A method includes generating light in a light generating chamber, causing a portion of the generated light to pass through a tube having a roughened inner surface, and detecting the portion of the generated light that has passed through the tube using a photodetector. The roughened inner surface of the tube has a surface roughness sufficient to cause grazing incidences of light to be eliminated rather than to be reflected off the roughened inner surface. In one example, the method includes outputting a signal from the photodetector to a controller, with the signal corresponding to the detected portion of the generated light. The light generated in the light generating chamber can be extreme ultraviolet (EUV) light. In tests using roughened and non-roughened protection tubes, the roughened tube was found to minimize or essentially eliminate the contribution to EUV energy from grazing incidence reflections off the inner surface of the tube.

Eyewear having radiation monitoring capability is disclosed. Radiation, such as ultraviolet (UV) radiation, infrared (IR) radiation or light, can be measured by a detector. The measured radiation can then be used in providing radiation-related information to a user of the eyewear. Advantageously, the user of the eyewear is able to easily monitor their exposure to radiation.

An ultraviolet light sensing circuit and sensing system. The ultraviolet light sensing circuit comprises a modulation unit and a phase delay unit, wherein the modulation unit comprises a first stage of inverter which is used for sensing ultraviolet light and is used as a voltage feedback modulation stage; and the phase delay unit comprises N stages of inverters which are connected in sequence, where N is an even number which is greater than or equal to 2. The modulation unit is connected to the phase delay unit in sequence, and the output voltage of the phase delay unit is fed to the modulation unit; and the modulation unit is modulated by a control signal which is a pulse signal. The ultraviolet light sensing circuit and sensing system can be used for ultraviolet light information communications. The ultraviolet light sensing circuit can sense ultraviolet light signals and output amplitude modulation wave signals.

A wearable or attachable device comprising a UV sensor configured to provide user-specific burn rate times providing an indication to the user when they are exposing themselves to harmful levels of UV radiation.

An ultraviolet detection system and method comprises a Bluetooth MCU control unit, a Bluetooth antenna impedance matching unit and an ultraviolet detection unit. A sensor is a silicon product, which is formed by SOI technology, and the sensor can test the current UVI accurately and quickly, such that the ultraviolet detection system can provide accurate advice to customers to avoid being sunburned. The Bluetooth MCU is a low power consumption Bluetooth chip.

The invention provides a system and related equipment for the precise measurement of the output characteristic of a light source, e.g., a dental light curing unit (LCU) or light for photodynamic therapy, using a light collector, a light detector, and a computer programmed to deliver the value of the output characteristic of the light source to the user. The systems allow for the determination of a proper 5 exposure time or the selection of a light source as needed for a specific application. The invention also provides a light device.

An inspection method and an inspection platform applicable for inspecting a light source used to expose a substrate. The light source is adapted to form an illuminated area on a surface of the substrate. The inspection method includes the following steps: placing at least one inspection component on the surface of the substrate; causing the at least one inspection component and the illuminated area to have a relative movement and a relative speed in a specific direction so as to make the illuminated area move across the at least one inspection component, wherein in the specific direction, the illuminated area is smaller in size than the at least one inspection component; inspecting photon energy of incident light in the illuminated area by the at least one inspection component during the relative movement; and determining optical values of the light source according to the photon energy and the relative speed.

An ultraviolet detecting silicon carbide junction field effect transistor with a transistor gate junction positioned proximate to the outer surface to receive ultraviolet: light and flow an ultraviolet light induced photo current when reverse biased.

A system for generating extreme ultraviolet light may include a chamber, a target supply device configured to supply a target material into the chamber, a laser apparatus configured to output a laser beam to irradiate the target material, a wavefront adjuster configured to adjust a wavefront of the laser beam, an imaging optical system configured to focus the laser beam reflected by the target material, an image detector configured to capture an image of the laser beam focused by the imaging optical system, and a controller configured to control the wavefront adjuster based on the captured image.

The ultraviolet sensor device comprises a semiconductor substrate, a dielectric layer above the substrate, a surface of the dielectric layer that is provided for the incidence of ultraviolet radiation, a floating gate electrode in the dielectric layer and an electrically conductive control gate electrode near the floating gate electrode. The control gate electrode is insulated from the floating gate electrode. A sensor layer is formed by an electrically conductive further layer that is electrically conductively connected to the floating gate electrode. The control gate electrode is arranged outside a region that is located between the sensor layer and the surface provided for the incidence of ultraviolet radiation. The sensor layer is discharged by incident UV radiation and can be charged or discharged electrically by charging or discharging the floating gate electrode.