Patent classifications
G
PHYSICS
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G02
OPTICS
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G02B
OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
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27/00
Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
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G02B27/0025
for optical correction, e.g. distorsion, aberration
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G02B27/0037
with diffracting elements
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G02B27/0043
in projection exposure systems, e.g. microlithographic systems
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