A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

A robot learning system for trajectory learning of a robot (RB) having a robot arm between a base and a tool center point (TCP). A user interface allows the user to control the robot arm in order to follow a desired trajectory during a real-time. A probe sensor (PS) is mounted on the TCP during the learning session. The probe sensor (PS) measures a distance parameter (Z) indicative of distance from the TCP and a surface forming the trajectory to be followed, and an orientation parameter (X, Y) indicative of orientation of the TCP and the surface forming the trajectory to be followed. These distance and orientation data are provided as a feedback to the controller of the robot (CTL) during the real-time learning session, thereby allowing the robot controller software to assist the user in following a desired trajectory in a continuous manner. Especially, the probe sensor (PS) may have a displaceable tip (TP) to follow a surface and having a neutral or center position, and where the robot controller software controls the robot movements to seek the neutral or center position irrespective of the user's control inputs. Data (DT) is logged during the learning session, so as to allow later control of the robot (RB) in response to the data (DT) logged during the learning session.

A robot learning system for trajectory learning of a robot (RB) having a robot arm between a base and a tool center point (TCP). A user interface allows the user to control the robot arm in order to follow a desired trajectory during a real-time. A probe sensor (PS) is mounted on the TCP during the learning session. The probe sensor (PS) measures a distance parameter (Z) indicative of distance from the TCP and a surface forming the trajectory to be followed, and an orientation parameter (X, Y) indicative of orientation of the TCP and the surface forming the trajectory to be followed. These distance and orientation data are provided as a feedback to the controller of the robot (CTL) during the real-time learning session, thereby allowing the robot controller software to assist the user in following a desired trajectory in a continuous manner. Especially, the probe sensor (PS) may have a displaceable tip (TP) to follow a surface and having a neutral or center position, and where the robot controller software controls the robot movements to seek the neutral or center position irrespective of the user's control inputs. Data (DT) is logged during the learning session, so as to allow later control of the robot (RB) in response to the data (DT) logged during the learning session.

A substrate mapping device 4 maps a plurality of substrates 10 inside a container where the substrates 10 are accommodated so as to be arrayed in a given arrayed direction. The substrate mapping device 4 includes a sensor 16 configured to detect a state of the substrate 10, a manipulator 14 configured to move the sensor 16, and a control device 18 configured to control the manipulator 14 to move the sensor 16 along a mapping course. The control device 18 sets a first mapping position and a second mapping position different in the position in the arrayed direction of the substrates 10 from the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.

A substrate mapping device 4 maps a plurality of substrates 10 inside a container where the substrates 10 are accommodated so as to be arrayed in a given arrayed direction. The substrate mapping device 4 includes a sensor 16 configured to detect a state of the substrate 10, a manipulator 14 configured to move the sensor 16, and a control device 18 configured to control the manipulator 14 to move the sensor 16 along a mapping course. The control device 18 sets a first mapping position and a second mapping position different in the position in the arrayed direction of the substrates 10 from the first mapping position, and sets the mapping course based on the first mapping position and the second mapping position.

A teaching apparatus for a manipulator is provided, including: a fixing member for fixing to the manipulator; a main body connected to the fixing member; and a handle connected to the main body. The main body includes a plurality of sensors and an operation display member, wherein at least one of the sensors is disposed on one side of the main body adjacent the fixing member and configured for sensing a force, a stress or a torque applied to the main body, and the operation display member is disposed on the other side of the main body and includes a plurality of function keys and a display screen disposed thereon. The teaching apparatus allows the path-teaching process for a manipulator to be completed quickly and easily.

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.

A semiconductor process transport apparatus including a drive section with at least one motor, an articulated arm coupled to the drive section for driving articulation motion, a machine controller coupled to the drive section to control the at least one motor moving the articulated arm from one location to a different location, and an adapter pendant having a machine controller interface coupling the adapter pendant for input/output with the machine controller, the adapter pendant having another interface, configured for connecting a fungible smart mobile device having predetermined resident user operable device functionality characteristics, wherein the other interface has a connectivity configuration so mating of the fungible smart mobile device with the other interface automatically enables configuration of at least one of the resident user operable device functionality characteristics to define an input/output to the machine controller effecting input commands and output signals for motion control of the articulated arm.