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H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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49/00
Particle spectrometers or separator tubes
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H01J49/02
Details
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H01J49/10
Ion sources; Ion guns
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H01J49/105
using high-frequency excitation, e.g. microwave excitation, Inductively Coupled Plasma [ICP]
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