Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
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H01J2237/25
Tubes for localised analysis using electron or ion beams
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H01J2237/2505
characterised by their application
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H01J2237/2511
Auger spectrometers
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