A trench MOSFET is disclosed having shielded trenched gates in active area, multiple floating trenched gates and at least one channel stop trenched gate in termination area. A semiconductor power device layout is disclosed consisting of at least two said trench MOSFETs connected together with multiple sawing trenched gates across a space between the two trench MOSFETs having a width same as scribe line, making the invented trench MOSFET be feasibly achieved without degraded performance.

According to one embodiment, a semiconductor device includes a first electrode extending along a first direction, a second electrode including a portion extending along the first direction, a third electrode extending along the first direction, a first member, first and second semiconductor regions, and a conductive portion. A position of the second electrode in a second direction is between the third electrode and the first electrode in the second direction crossing the first direction. A distance along the second direction between the third and second electrodes is shorter than a distance along the second direction between the second and first electrodes. The first member includes first and second regions. A conductivity of the second region is lower than a conductivity of the first region. The first semiconductor region includes Al.sub.x1Ga.sub.1-x1N. The second semiconductor region includes Al.sub.x2Ga.sub.1-x2N. A conductive portion is electrically connected to the first electrode.

In an inactive region of an active region, a gate pad, a gate poly-silicon layer, and a gate finger are provided at a front surface of a semiconductor substrate, via an insulating film. The gate poly-silicon layer is provided beneath the gate pad, sandwiching the insulating film therebetween. The gate pad, the gate poly-silicon layer, a gate finger, gate electrodes of a trench gate structure, a gate finger, and a second measurement pad are electrically connected in the order stated. As a result, the gate electrodes where parasitic resistance occurs and the gate poly-silicon layer where built-in resistance occurs are connected in series between the second measurement pad and the gate pad. A resistance value of the overall gate resistance that is a combined resistance of the built-in resistance and the parasitic resistance may be measured by the second measurement pad.

Representative techniques and devices including process steps may be employed to mitigate the potential for delamination of bonded microelectronic substrates due to metal expansion at a bonding interface. For example, a metal pad may be disposed at a bonding surface of at least one of the microelectronic substrates, where the contact pad is positioned offset relative to a TSV in the substrate and electrically coupled to the TSV.

A semiconductor package includes a semiconductor die having a semiconductor device, and first and second contact pads arranged on opposite surfaces of the die. The semiconductor die is embedded in a dielectric layer. The semiconductor package also includes one or more first package contact pads and one or more second package contact pads arranged on a first major surface of the semiconductor package. The first contact pad of the die is coupled to the one or more first package contact pads, and the second contact pad of the die is coupled to the one or more second package contact pads. In operation, the semiconductor device causes a current path between the first contact pad and the second contact pad. The package contact pads are arranged on the first major surface of the semiconductor package to provide multiple non-parallel current paths.

In some embodiments, a semiconductor device includes a semiconductor die including a vertical transistor device having a source electrode, a drain electrode and a gate electrode, the semiconductor die having a first surface and a metallization structure located on the first surface. The metallization structure includes a first conductive layer on the first surface, a first insulating layer on the first conductive layer, a second conductive layer on the first insulating layer, a second insulating layer on the second conductive layer and a third conductive layer on the second insulting layer. The third conductive layer includes at least one source pad electrically coupled to the source electrode, at least one drain pad electrically coupled to the drain electrode and at least one gate pad electrically coupled to the gate electrode.

In a semiconductor device including gate fingers each having a linear shape extending from a feed line, and arranged in areas between drain electrodes and source electrodes, open stubs are connected directly to the feed line.

A chip package structure is provided. The chip package structure includes a first substrate. The chip package structure includes a conductive via structure passing through the first substrate. The chip package structure includes a chip over a first surface of the first substrate. The chip package structure includes a barrier layer over a second surface of the first substrate. The chip package structure includes an insulating layer over the barrier layer. The chip package structure includes a conductive pad over the insulating layer and passing through the insulating layer and the barrier layer to connect with the conductive via structure. The chip package structure includes a conductive bump over the conductive pad.

A semiconductor device may include a semiconductor substrate, an upper electrode provided on an upper surface of the semiconductor substrate, a lower electrode provided on a lower surface of the semiconductor substrate, and a terminal connected to the upper electrode. The semiconductor substrate may include an active region in which switching elements are provided. The switching elements may be configured to pass a current between the upper electrode and the lower electrode. The active region may include a main region located under the terminal and an external region located outside the main region. The external region may include a low current region. A current density in the low current region may be lower than a current density in the main region in a case where the switching elements in the low current region and the main region are turned on.

A substrate has an active area including first and second doped regions separated by portions of the substrate. Gates are located over the active area, each gate formed extending over a portion of the substrate separating adjacent first and second doped regions. A length of the doped regions is greater than other devices within the substrate that have a same gate oxide thickness. A first metallization layer has first electrical connectors between each of the first doped regions and a gate immediately adjacent thereto, and second electrical connectors connected to each of the second doped regions. A second metallization layer has a first electrical connector connected to each first electrical connector of the first metallization layer, and a second electrical connector connected to each second electrical connector of the first metallization layer, with the second electrical connector of the second metallization layer not overlapping the gates.