Large area, high current, lateral GaN power transistors are implemented using an on-chip interconnect topology wherein the transistor is arranged as an array of sections, each section comprising a set of transistor islands; gate and source buses that form each gate drive loop have substantially the same track widths; the source bus runs over or under the gate bus, and the tracks are inductively coupled to provide flux cancellation in the gate drive loop, thereby reducing parasitic inductances. The gate delay in each gate drive loop is reduced, minimizing the gate drive phase difference across the transistor. An overlying current redistribution layer preferably has a track width no greater than that of the underlying source and drain buses, for efficient coupling. This topology provides improved scalability, enabling fabrication of multi-section, large scale, high current lateral GaN transistors with reduced gate drive loop inductance, for improved operational stability.

Circuit-Under-Pad (CUP) device topologies for high current lateral GaN power transistors comprise first and second levels of on-chip metallization M1 and M2; M1 defines source, drain and gate finger electrodes of a plurality of sections of a multi-section transistor and a gate bus; M2 defines an overlying contact structure comprising a drain pad and source pads extending over active regions of each section. The drain and source pads of M2 are interconnected by conductive micro-vias to respective underlying drain and source finger electrodes of M1. The pad structure and the micro-via interconnections are configured to reduce current density in self-supported widths of source and drain finger electrodes, i.e. to optimize a maximum current density for each section. For reduced gate loop inductance, part of each source pad is routed over the gate bus. Proposed CUP device structures provide for higher current carrying capability and reduced drain-source resistance.

Provided is a layout configuration that helps facilitate manufacturing a semiconductor integrated circuit device including a nanowire FET. A nanowire FET in a standard cell includes Na (where Na is an integer of 2 or more) nanowires extending in an X direction, and a nanowire FET in a standard cell includes Nb (where Nb is an integer of 1 or more and less than Na) nanowires extending in the X direction. At least one of both ends, in the Y direction, of a pad of the nanowire FET is aligned in the X direction with an associated one of both ends, in the Y direction, of a pad of the nanowire FET.

According to example configurations herein, a leadframe includes a first conductive strip, a second conductive strip, and a third conductive strip disposed substantially adjacent and substantially parallel to each other. A semiconductor chip substrate includes a first array of switch circuits disposed adjacent and parallel to a second array of switch circuits. Source nodes in switch circuits of the first array are disposed substantially adjacent and substantially parallel to source nodes in switch circuits of the second array. When the semiconductor chip and the leadframe device are combined to form a circuit package, a connectivity interface between the semiconductor chip and conductive strips in the circuit package couples each of the source nodes in switch circuits of the first array and each of the multiple source nodes in switch circuits of the second array to a common conductive strip in the leadframe device.

The present invention provides a semiconductor device that can reduce effects of noise without complicating processes or increasing chip area. The semiconductor device according to an aspect of the present invention includes a semiconductor substrate, a drain region, a drift region, a base region, a source region, a gate electrode, an interlayer insulating film, a conductive layer electrically coupled to the drain region, a wiring line, and a contact plug electrically coupled to the source region and the wiring line. The interlayer insulating film has an intermediate interlayer insulating film. The intermediate interlayer insulating film is arranged between the conductive layer and the contact plug. The intermediate interlayer insulating film is a thermal oxide film of a material that forms the conductive layer.

A semiconductor package includes a die and a patterned conductive layer electrically connected to the die. The patterned conductive layer includes a connection pad and a trace. The semiconductor package further includes an encapsulation layer encapsulating the die and the patterned conductive layer. The semiconductor package further includes an electrical connection element disposed on the connection pad and a protection layer including a sidewall portion surrounding the electrical connection element.

A semiconductor device includes a semiconductor substrate, a conductive pad over the semiconductor substrate, a conductor over the conductive pad, a polymeric material over the semiconductor substrate and surrounding the conductor, and a seed layer between the polymeric material and the conductor. A top surface of the conductor, a top surface of the polymeric material and a top surface of the seed layer are substantially coplanar.

Large area, high current, lateral GaN power transistors are implemented using an on-chip interconnect topology wherein the transistor is arranged as an array of sections, each section comprising a set of transistor islands; gate and source buses that form each gate drive loop have substantially the same track widths; the source bus runs over or under the gate bus, and the tracks are inductively coupled to provide flux cancellation in the gate drive loop, thereby reducing parasitic inductances. The gate delay in each gate drive loop is reduced, minimizing the gate drive phase difference across the transistor. An overlying current redistribution layer preferably has a track width no greater than that of the underlying source and drain buses, for efficient coupling. This topology provides improved scalability, enabling fabrication of multi-section, large scale, high current lateral GaN transistors with reduced gate drive loop inductance, for improved operational stability.

A semiconductor device comprising a switch and a method of making the same. The device, has a layout having one or more rectangular unit cells. Each unit cell includes a gate having a substantially cross-shaped part comprising four arms that divide the unit cell into quadrants; and a substantially loop-shaped part, wherein a center of the cross-shaped part is located inside the loop-shaped part, and wherein the loop-shaped part intersects each arm of the cross-shaped part to divide each quadrant into an inner region located inside the loop-shaped part; and an outer region located outside the loop-shaped part. Each unit cell also includes a substantially loop-shaped active region forming a source and drain of the switch. Each unit cell further includes a plurality of connection members extending over the gate, source and drain for providing electrical connections to the source and drain.

An LED module includes: a substrate having a main surface and a back surface which face in opposite directions from each other in a thickness direction; a first LED chip including a first electrode pad bonded to a surface facing the same direction as the main surface; a first wire having one end bonded to the first electrode pad; and a wiring pattern having a main surface electrode formed in the main surface, wherein the main surface electrode includes a first die pad portion which supports the first LED chip, and when viewed from the thickness direction, the first die pad portion includes a main pad portion to which the first LED chip is bonded and an auxiliary pad portion which protrudes from the main pad portion in a direction toward a position of the first electrode pad from the center position in the first LED chip.