Patent classifications
H
ELECTRICITY
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H05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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H05K
PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
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2203/00
Indexing scheme relating to apparatus or processes for manufacturing printed circuits covered by H05K3/00
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H05K2203/05
Patterning and lithography; Masks; Details of resist
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H05K2203/0554
Metal used as mask for etching vias, e.g. by laser ablation
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