Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
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H01J37/32
Gas-filled discharge tubes
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H01J37/34
operating with cathodic sputtering
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H01J37/347
Thickness uniformity of coated layers or desired profile of target erosion
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