Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
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H01J2237/245
Detection characterised by the variable being measured
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H01J2237/24507
Intensity, dose or other characteristics of particle beams or electromagnetic radiation
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H01J2237/24514
Beam diagnostics including control of the parameter or property diagnosed
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H01J2237/24528
Direction of beam or parts thereof in view of the optical axis, e.g. beam angle, angular distribution, beam divergence, beam convergence or beam landing angle on sample or workpiece
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