Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
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2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
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H01J2237/30
Electron or ion beam tubes for processing objects
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H01J2237/317
Processing objects on a microscale
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H01J2237/31769
Proximity effect correction
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