Patent classifications
H
ELECTRICITY
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H03
ELECTRONIC CIRCUITRY
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H03H
IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
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9/00
Networks comprising electromechanical or electro-acoustic elements; Electromechanical resonators
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H03H9/02244
of microelectro-mechanical resonators
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H03H9/02259
Driving or detection means
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H03H9/02275
Comb electrodes
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