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H
ELECTRICITY
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H05
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
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H05H
PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
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1/00
Generating plasma; Handling plasma
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H05H1/24
Generating plasma
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H05H1/2406
using dielectric barrier discharges, i.e. with a dielectric interposed between the electrodes
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H05H1/2443
the plasma fluid flowing through a dielectric tube
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H05H1/2465
the plasma being activated by inductive coupling, e.g. using coiled electrodes
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