Patent classifications
H
ELECTRICITY
Load children
H01
ELECTRIC ELEMENTS
Load children
H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
Load children
21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
Load children Filter patents View analytics View as hierarchy
H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
Load children Filter patents View analytics View as hierarchy
H01L21/02107
Forming insulating materials on a substrate
Load children Filter patents View analytics View as hierarchy
H01L21/02109
characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
Load children Filter patents View analytics View as hierarchy
H01L21/02112
characterised by the material of the layer
Load children Filter patents View analytics View as hierarchy
H01L21/02123
the material containing silicon
Load children Filter patents View analytics View as hierarchy
H01L21/02167
the material being a silicon carbide not containing oxygen, e.g. SiC, SiC:H or silicon carbonitrides
Filter patents View analytics View as hierarchy