IPIQ

ELECTRICITY

H01

ELECTRIC ELEMENTS

H01L

SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

21/00

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02

Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/02104

Forming layers

H01L21/02107

Forming insulating materials on a substrate

H01L21/02225

characterised by the process for the formation of the insulating layer

H01L21/0226

formation by a deposition process

H01L21/02282

liquid deposition, e.g. spin-coating, sol-gel techniques, spray coating

H01L21/0229

liquid atomic layer deposition