IPIQ

ELECTRICITY

H01

ELECTRIC ELEMENTS

H01L

SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10

21/00

Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

H01L21/02

Manufacture or treatment of semiconductor devices or of parts thereof

H01L21/02104

Forming layers

H01L21/02107

Forming insulating materials on a substrate

H01L21/02109

characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates

H01L21/02112

characterised by the material of the layer

H01L21/02123

the material containing silicon

H01L21/02142

the material containing silicon and at least one metal element, e.g. metal silicate based insulators or metal silicon oxynitrides

H01L21/02161

the material containing more than one metal element