Patent classifications
Y
GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Y10
TECHNICAL SUBJECTS COVERED BY FORMER USPC
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Y10S
TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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Y10S977/84
Manufacture, treatment, or detection of nanostructure
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Y10S977/855
for manufacture of nanostructure
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Y10S977/856
including etching/cutting
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