Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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99/00
Subject matter not provided for in other groups of this subclass
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B81C99/003
Characterising MEMS devices, e.g. measuring and identifying electrical or mechanical constants
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