Patent classifications
H
ELECTRICITY
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H10
SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
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H10D
INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
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64/00
Electrodes of devices having potential barriers
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H10D64/017
using dummy gates in processes wherein at least parts of the final gates are self-aligned to the dummy gates, i.e. replacement gate processes
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