Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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1/00
Devices without movable or flexible elements, e.g. microcapillary devices
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B81B1/002
Holes characterised by their shape, in either longitudinal or sectional plane
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B81B1/004
Through-holes, i.e. extending from one face to the other face of the wafer
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