Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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3/00
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
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B81B3/0035
Constitution or structural means for controlling the movement of the flexible or deformable elements
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B81B3/0056
Adjusting the distance between two elements, at least one of them being movable, e.g. air-gap tuning
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