Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
Load children
B81
MICROSTRUCTURAL TECHNOLOGY
Load children
B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
Load children
1/00
Manufacture or treatment of devices or systems in or on a substrate
Load children Filter patents View analytics View as hierarchy
B81C1/00865
Multistep processes for the separation of wafers into individual elements
Load children Filter patents View analytics View as hierarchy
B81C1/0088
Separation allowing recovery of the substrate or a part of the substrate, e.g. epitaxial lift-off
Filter patents View analytics View as hierarchy