Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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99/00
Subject matter not provided for in other groups of this subclass
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B81C99/0005
Apparatus specially adapted for the manufacture or treatment of microstructural devices or systems, or methods for manufacturing the same
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B81C99/002
Apparatus for assembling MEMS, e.g. micromanipulators
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