Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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2203/00
Basic microelectromechanical structures
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B81B2203/0346
Grooves not provided for in B81B2203/033 - B81B2203/0338
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