Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
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2203/00
Basic microelectromechanical structures
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B81B2203/0369
characterized by their profile
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B81B2203/0392
profiles not provided for in B81B2203/0376 - B81B2203/0384
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