Patent classifications
B
PERFORMING OPERATIONS; TRANSPORTING
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B81
MICROSTRUCTURAL TECHNOLOGY
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B81C
PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
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1/00
Manufacture or treatment of devices or systems in or on a substrate
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B81C1/00912
Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
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B81C1/0092
For avoiding stiction during the manufacturing process of the device, e.g. during wet etching
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B81C1/00928
Eliminating or avoiding remaining moisture after the wet etch release of the movable structure
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