SENSOR UNIT, CONTROL METHOD, AND NON-TRANSITORY COMPUTER READABLE MEDIUM STORING PROGRAM

Abstract

A sensor unit includes a first unit to acquire a first light amount that is a light amount of light obtained when light reflected by an object is received by a light receiving unit, a second unit to acquire at least one of a second light amount that is a light amount of light obtained when light emitted from a light emitting unit and reflected by the window is received by the light receiving unit and a third light amount that is a light amount of light obtained when light that is emitted from the emitter, passes through the window, and is reflected by the reflector and light that is emitted from the emitter and reflected by the window are received by the optical receiver, and a determination unit to determine whether abnormality occurs on a side of the object or a side of the window.

Claims

1. A sensor unit comprising: a sensor including a light emitting unit, a light receiving unit, a window, a signal processor, an emitter, a reflector, and an optical receiver, the signal processor being configured to measure a distance to an object when light that is emitted from the light emitting unit, passes through the window, and is reflected by the object passes through the window and is received by the light receiving unit; a first acquisition unit configured to acquire a first received light amount that is a light amount of light obtained when light reflected by the object is received by the light receiving unit; a second acquisition unit configured to acquire at least one of a second received light amount that is a light amount of light obtained when light emitted from the light emitting unit and reflected by the window is received by the light receiving unit and a third received light amount that is a light amount of light obtained when light that is emitted from the emitter, passes through the window, and is reflected by the reflector and light that is emitted from the emitter and reflected by the window are received by the optical receiver; and a determination unit configured to determine whether abnormality occurs on a side of the object or on a side of the window based on the first received light amount and at least one of the second received light amount and the third received light amount.

2. The sensor unit according to claim 1, wherein the determination unit is configured to: determine that abnormality occurs on the side of the object in a case where it is determined a predetermined number of times that the first received light amount is not included in a first predetermined range and the second received light amount is included in a second predetermined range; and determine that abnormality occurs on the side of the window in a case where it is determined a predetermined number of times that the first received light amount is not included in the first predetermined range and the second received light amount is not included in the second predetermined range.

3. The sensor unit according to claim 1, wherein the determination unit is configured to: determine that abnormality occurs on the side of the object in a case where it is determined a predetermined number of times that the first received light amount is not included in a first predetermined range and the third received light amount is included in a third predetermined range; and determine that abnormality occurs on the side of the window in a case where it is determined a predetermined number of times that the first received light amount is not included in the first predetermined range and the third received light amount is not included in the third predetermined range.

4. The sensor unit according to claim 1, wherein the sensor is configured to measure a distance to the object in a plurality of directions, the first acquisition unit is configured to acquire the first received light amount in the plurality of directions, the second acquisition unit is configured to acquire the second received light amount in the plurality of directions, and the determination unit is configured to determine whether abnormality occurs on the side of the object or the side of the window based on the first received light amount in the plurality of directions and the second received light amount in the plurality of directions.

5. The sensor unit according to claim 4, wherein the determination unit is configured to: determine that abnormality occurs on the side of the object in a case where it is determined a predetermined number of times that the first received light amount in one direction among the plurality of directions is not included in a first predetermined range and the second received light amount in the one direction is included in a second predetermined range; and determine that abnormality occurs on the side of the window in a case where it is determined a predetermined number of times that the first received light amount in one direction among the plurality of directions is not included in the first predetermined range and the second received light amount in the one direction is not included in the second predetermined range.

6. The sensor unit according to claim 4, wherein the determination unit is configured to: determine that abnormality occurs on the side of the object in a case where it is determined a predetermined number of times that the first received light amount in at least two directions among the plurality of directions is not included in a first predetermined range and the second received light amount in the at least two directions is included in a second predetermined range; and determine that abnormality occurs on the side of the window in a case where it is determined a predetermined number of times that the first received light amount in at least two directions among the plurality of directions is not included in the first predetermined range and the second received light amount in the at least two directions is not included in the second predetermined range.

7. The sensor unit according to claim 1, wherein the sensor is configured to measure a distance to the object in a plurality of directions, a plurality of the emitters, a plurality of the reflectors, and a plurality of the optical receivers are arranged along an outer periphery of the window, the first acquisition unit is configured to acquire the first received light amount in the plurality of directions, the second acquisition unit is configured to acquire the third received light amount in the plurality of directions, and the determination unit is configured to determine whether abnormality occurs on the side of the object or the side of the window based on the first received light amount in the plurality of directions and the third received light amount in the plurality of directions.

8. The sensor unit according to claim 7, wherein the determination unit is configured to: determine that abnormality occurs on the side of the object in a case where it is determined a predetermined number of times that the first received light amount in one direction among the plurality of directions is not included in a first predetermined range and the third received light amount in the one direction is included in a third predetermined range; and determine that abnormality occurs on the side of the window in a case where it is determined a predetermined number of times that the first received light amount in one direction among the plurality of directions is not included in the first predetermined range and the third received light amount in the one direction is not included in the third predetermined range.

9. The sensor unit according to claim 7, wherein the determination unit is configured to: determine that abnormality occurs on the side of the object in a case where it is determined a predetermined number of times that the first received light amount in at least two directions among the plurality of directions is not included in a first predetermined range and the third received light amount in the at least two directions is included in a third predetermined range; and determine that abnormality occurs on the side of the window in a case where it is determined a predetermined number of times that the first received light amount in at least two directions among the plurality of directions is not included in the first predetermined range and the third received light amount in the at least two directions is not included in the third predetermined range.

10. The sensor unit according to claim 1, further comprising: a generation unit configured to generate information regarding abnormality on the side of the object in a case where the determination unit determines that abnormality occurs on the side of the object, and generate information regarding abnormality on the side of the window in a case where the determination unit determines that abnormality occurs on the side of the window; and a display unit configured to display the information regarding abnormality on the side of the object or the information regarding abnormality on the side of the window.

11. A control method of a sensor unit including a light emitting unit, a light receiving unit, a window, an emitter, a reflector, and an optical receiver, the control method comprising: a measuring step of measuring a distance to an object when light that is emitted from the light emitting unit, passes through the window, and is reflected by the object passes through the window and is received by the light receiving unit; a first acquiring step of acquiring a first received light amount that is a light amount of light obtained when light reflected by the object is received by the light receiving unit; a second acquiring step of acquiring at least one of a second received light amount that is a light amount of light obtained when light emitted from the light emitting unit and reflected by the window is received by the light receiving unit and a third received light amount that is a light amount of light obtained when light that is emitted from the emitter, passes through the window, and is reflected by the reflector and light that is emitted from the emitter and reflected by the window are received by the optical receiver; and a determining step of determining whether abnormality occurs on a side of the object or a side of the window based on the first received light amount and at least one of the second received light amount and the third received light amount.

12. A non-transitory computer readable medium storing a program for causing a processor of a sensor unit including a light emitting unit, a light receiving unit, a window, an emitter, a reflector, and an optical receiver to execute: a measuring step of measuring a distance to an object when light that is emitted from the light emitting unit, passes through the window, and is reflected by the object passes through the window and is received by the light receiving unit; a first acquiring step of acquiring a first received light amount that is a light amount of light obtained when light reflected by the object is received by the light receiving unit; a second acquiring step of acquiring at least one of a second received light amount that is a light amount of light obtained when light emitted from the light emitting unit and reflected by the window is received by the light receiving unit and a third received light amount that is a light amount of light obtained when light that is emitted from the emitter, passes through the window, and is reflected by the reflector and light that is emitted from the emitter and reflected by the window are received by the optical receiver; and a determining step of determining whether abnormality occurs on a side of the object or a side of the window based on the first received light amount and at least one of the second received light amount and the third received light amount.

Description

BRIEF DESCRIPTION OF THE DRAWINGS

[0022] FIG. 1 is a diagram illustrating a configuration of a sensor unit;

[0023] FIG. 2 is a block diagram of a sensor;

[0024] FIG. 3 is a schematic diagram of the sensor unit;

[0025] FIG. 4 is a diagram illustrating an example of a time chart of a signal;

[0026] FIG. 5 is a diagram illustrating an example of a time chart of a signal;

[0027] FIG. 6 is a functional block diagram of a processor;

[0028] FIG. 7 is a diagram illustrating an example of installation of the sensor unit;

[0029] FIG. 8 is a diagram illustrating an example of installation of the sensor unit;

[0030] FIG. 9 is a schematic view of the sensor unit as viewed from the side surface side;

[0031] FIG. 10 is a schematic view of the sensor unit as viewed from the side surface side;

[0032] FIG. 11 is a schematic view of the sensor unit as viewed from the side surface side;

[0033] FIG. 12 is a flowchart illustrating an example of setting processing of reference point monitoring;

[0034] FIG. 13 is a flowchart illustrating an example of reference point monitoring processing;

[0035] FIG. 14 is a flowchart illustrating an example of abnormal position identifying processing;

[0036] FIG. 15 is a diagram illustrating an example of a screen of a display device;

[0037] FIG. 16 is a diagram illustrating an example of a screen of the display device; and

[0038] FIG. 17 is a diagram illustrating an example of setting of a stop area and a warning area.

DETAILED DESCRIPTION

[0039] Hereinafter, an application example and an embodiment will be described with reference to the drawings. The application example and embodiment are one aspect of the present application, and do not limit the scope of rights of the present application.

Application Example

[0040] One application example of the present invention will be described with reference to FIGS. 1 to 3. FIG. 1 is a diagram illustrating a configuration of a sensor unit (sensor system) 1. The sensor unit 1 includes a sensor 10 of a reflective type, a main body 11, a processor 12 that performs predetermined processing, and a display device 13 capable of displaying predetermined information. The sensor unit 1 may have an integrated configuration in which the processor 12 and the display device 13 are provided in one casing, or may have a configuration in which the processor 12 and the display device 13 are separated and connected in a wired or wireless manner. In the configuration example illustrated in FIG. 1, the processor 12 is provided in the main body 11, and the display device 13 is provided on an outer surface of the main body 11. The display device 13 is an example of a display. In addition to the processor 12 and the display device 13, the main body 11 is provided with a light source, an optical system, a light receiving device, and the like that are a part of the sensor 10.

[0041] In the present specification, the “sensor of a reflective type” means a sensor capable of measuring a distance to an object by observing an electromagnetic wave reflected by the object, and includes, for example, a distance measuring sensor (LiDAR or the like) using laser light and a distance measuring sensor (millimeter wave radar or the like) using radio waves. An electromagnetic wave reflected by an object includes light. A measurement system of the sensor of a reflective type may be any system, and examples of the measurement system include a ToF system and a triangulation system. In order to measure objects in a plurality of directions, an area sensor having a two-dimensional measurement area (visual field) or a three-dimensional measurement area (visual field) is used.

[0042] The sensor unit 1 is also called a safety laser scanner or a laser scanner, and is a safety sensor conforming to a safety standard such as ISO13849-1. The sensor 10 includes a window 101 and a top surface 102. The sensor 10 generally has a structure in which a window 101 having an inverted truncated cone shape is provided on the main body 11. The top surface 102 is provided on the window 101. The window 101 illustrated in FIG. 1 has a tapered shape expanding from one opening toward the other opening, but is not limited to this shape, and the window 101 may have a cylindrical shape.

[0043] The window 101 is transparent or translucent (colored with a predetermined transmittance), transmits a part of light, and reflects another part of light. The window 101 is made from a material that transmits laser light, and is a member for protecting an optical system such as a polygon mirror. Laser light output from a light source is reflected by a polygon mirror rotating at a high speed inside the window 101, so that the sensor 10 can scan a direction of about 270 degrees around. In this manner, the sensor 10 can measure a plurality of directions. That is, the sensor 10 can measure a distance to an object in a plurality of directions. Further, the sensor 10 measures a distance to an object at predetermined intervals (regular or irregular intervals). The processor 12 compares a distance to an object measured by the sensor 10 with a set predetermined distance, and performs predetermined processing on the basis of a comparison result.

[0044] FIG. 2 is a block diagram of the sensor 10. The sensor 10 includes a signal processor 21, a light emitting unit (transmitter) 22, a light receiving unit (receiver) 23, and a drive circuit 24. The light emitting unit 22 is, for example, a laser diode. When the signal processor 21 controls the drive circuit 24, drive current is applied to the light emitting unit 22, and the light emitting unit 22 emits pulsed light to transmit an optical signal. When the light emitting unit 22 transmits an optical signal, light is emitted from the light emitting unit 22, and the light is emitted by passing through the window 101 to the outside via an optical component 25 such as a lens or a polygon mirror.

[0045] The light receiving unit 23 is, for example, a photodiode. Light emitted from the light emitting unit 22 to the outside and reflected by an object to be measured (hereinafter, also referred to as measurement target object or target) passes through the window 101 and is input as an optical signal to the light receiving unit 23 via the optical component 25. The light receiving unit 23 converts the optical signal into an electric signal according to intensity of the input optical signal and outputs the electric signal. The electric signal output from the light receiving unit 23 is input to the signal processor 21.

[0046] The signal processor 21 may measure a distance to a measurement target object by a ToF system. For example, the signal processor 21 measures a distance to a measurement target object on the basis of a time at which light is emitted, a time at which reflected light is received, and a speed of light. Further, the signal processor 21 measures a received light amount of the light receiving unit 23. The signal processor 21 transmits measurement data to the processor 12. As described above, the sensor 10 measures a distance to a measurement target object and measures a received light amount of the light receiving unit 23 when light emitted from the light emitting unit 22 passes through the window 101, is reflected by the measurement target object, passes through the window 101, and is received by the light receiving unit 23. The processor 12 acquires a distance to a measurement target object and a received light amount of the light receiving unit 23 measured by the sensor 10.

[0047] When an attachable matter adheres to a surface of a measurement target object, a received light amount of the light receiving unit 23 may decrease or increase. Further, when an attachable matter adheres to a surface of the window 101, a received light amount of the light receiving unit 23 may decrease or increase. Even if only a change in a received light amount of the light receiving unit 23 is observed, it is difficult to determine a cause of the change in the received light amount of the light receiving unit 23, that is, whether the cause of occurrence of abnormality is on the measurement target object side or the window 101 side.

[0048] In view of the above, in the sensor unit 1, the processor 12 acquires a received light amount (hereinafter referred to as a first received light amount) that is an amount of light obtained when light emitted from the light emitting unit 22, passes through the window 101, and is reflected by a measurement target object passes through the window 101 and received by the light receiving unit 23. Further, the processor 12 acquires a received light amount (hereinafter referred to as a second received light amount) which is an amount of light obtained when light emitted from the light emitting unit 22 is reflected by the window 101 and is received by the light receiving unit 23. Since a time at which light reflected by a measurement target object is received by the light receiving unit 23 is different from a time at which light reflected by the window 101 is received by the light receiving unit 23, it is possible to distinguish between the first received light amount and the second received light amount. The processor 12 determines whether abnormality occurs on the measurement target object side or the window 101 side based on the first received light amount and the second received light amount.

[0049] When an attachable matter adheres to a surface of a measurement object, the first received light amount changes as compared with a case where no attachable matter adheres to the surface of the measurement object. For example, when oil or the like having a reflectance higher than that of a surface of a measurement target object adheres to the surface of the measurement target object, the first received light amount increases as compared with a case where no attachable matter adheres to the surface of the measurement target object. For example, when sand or a chip having a reflectance lower than that of a surface of a measurement target object adheres to the surface of the measurement target object, a reflection direction of light changes, and the first received light amount decreases as compared with a case where no attachable matter adheres to the surface of the measurement target object. For example, when a black adhesive substance or the like adheres to a surface of a measurement target object, the first received light amount decreases as compared with a case where no attachable matter adheres to the surface of the measurement target object. When an attachable matter adheres to a surface of the window 101, the first received light amount and the second received light amount change as compared with a case where no attachable matter adheres to the surface of the window 101.

[0050] For example, in a case where the first received light amount decreases or increases but the second received light amount does not decrease or increase, the processor 12 determines that a cause of the change in the first received light amount, that is, a cause of occurrence of abnormality on the measurement target object side. For example, in a case where the first received light amount decreases or increases and the second received light amount decreases or increases, the processor 12 determines that a cause of occurrence of abnormality on the window 101 side. As described above, the processor 12 determines whether abnormality occurs on the measurement target object side or the window 101 side on the basis of the first received light amount and the second received light amount, so that it is possible to grasp whether a cause of the change in the first received light amount, that is, a cause of occurrence of abnormality is on the measurement target object side or the window 101 side. By grasping whether a cause of occurrence of abnormality is on the measurement target object side or the window 101 side, it is possible to identify a position of the cause of the occurrence of the abnormality. That is, it is possible to identify whether the position of the cause of the occurrence of the abnormality is on the measurement target object side or the window 101 side.

[0051] In a case where it is determined a predetermined number of times that the first received light amount is not included in a first predetermined range (first received light amount range) and the second received light amount is included in a second predetermined range (second received light amount range), the processor 12 determines that abnormality occurs on the measurement target object side. For example, in a case where the first received light amount changes but the second received light amount does not change, a position of occurrence of abnormality is identified to be on the measurement target object side. In a case where it is determined a predetermined number of times that the first received light amount is not included in the first predetermined range and the second received light amount is not included in the second predetermined range, the processor 12 determines that abnormality occurs on the window 101 side. For example, in a case where the first received light amount and the second received light amount change, a position of occurrence of abnormality is determined to be on the window 101 side. The first predetermined range and the second predetermined range are obtained in advance by design, experiment, or simulation, and are stored in a memory of the processor 12. The predetermined number of times can be set to any number of times, and may be once or a plurality of times.

[0052] FIG. 3 is a schematic diagram of the sensor unit 1 in a case where the sensor unit 1 is viewed from the side surface side. The sensor unit 1 includes an emitter 103 that emits light, an optical receiver 104 that receives light, and a reflector 105 that reflects light. The emitter 103 is, for example, a laser diode or an LED. The optical receiver 104 is, for example, a photodiode. The reflector 105 is a plate-like member that reflects light.

[0053] In the configuration example illustrated in FIG. 3, a main body 11 is provided with the emitter 103 and the optical receiver 104, and the top surface 102 is provided with the reflector 105. Therefore, the emitter 103 and the optical receiver 104 are arranged below the window 101, and the reflector 105 is arranged above the window 101. The present invention is not limited to the configuration example illustrated in FIG. 3, and the reflector 105 may be provided in the main body 11, and the emitter 103 and the optical receiver 104 may be provided on the top surface 102. That is, the emitter 103 and the optical receiver 104 may be arranged above the window 101, and the reflector 105 may be arranged below the window 101. One of the emitter 103, one of the optical receiver 104, and one of the reflector 105 may be arranged. A plurality of the emitters 103, a plurality of the optical receivers 104, and a plurality of the reflectors 105 may be arranged at predetermined intervals along an outer periphery of the window 101.

[0054] The emitter 103, the optical receiver 104, and the reflector 105 are arranged such that a virtual line connecting the position of the emitter 103 and the position of the reflector 105 is inclined with respect to an outer peripheral surface of the window 101, and such that a virtual line connecting the position of the optical receiver 104 and the position of the reflector 105 is inclined with respect to the outer peripheral surface of the window 101. By the above, a part of light emitted from the emitter 103 passes through the window 101 and is reflected by the reflector 105, and the light reflected by the reflector 105 passes through the window 101 and is received by the optical receiver 104. Further, another part of the light emitted from the emitter 103 is reflected by the window 101, and the light reflected by the window 101 is received by the optical receiver 104.

[0055] The processor 12 acquires a received light amount (hereinafter referred to as a third received light amount), which is an amount of light obtained when light that is emitted from the emitter 103, passes through the window 101, and is reflected by the reflector 105 and light that is emitted from the emitter 103 and reflected by the window 101 are received by the optical receiver 104. The processor 12 may acquire the third received light amount from the optical receiver 104. Further, the processor 12 may acquire the third received light amount via a control circuit that controls the emitter 103 and the optical receiver 104. The processor 12 determines whether abnormality occurs on the measurement target object side or the window 101 side based on the first received light amount and the third received light amount.

[0056] When an attachable matter adheres to a surface of the window 101, the first received light amount and the third received light amount change as compared with a case where no attachable matter adheres to the surface of the window 101. For example, in a case where the first received light amount decreases or increases but the third received light amount does not decrease or increase, the processor 12 determines that a cause of occurrence of abnormality on the measurement target object side. For example, in a case where the first received light amount decreases or increases and the third received light amount decreases or increases, the processor 12 determines that a cause of occurrence of abnormality on the window 101 side. As described above, the processor 12 determines whether abnormality occurs on the measurement target object side or the window 101 side on the basis of the first received light amount and the third received light amount, so that it is possible to grasp whether a cause of the change in the first received light amount, that is, a cause of occurrence of abnormality is on the measurement target object side or the window 101 side. By grasping whether a cause of occurrence of abnormality is on the measurement target object side or the window 101 side, it is possible to identify a position of the cause of the occurrence of the abnormality. That is, it is possible to identify whether the position of the cause of the occurrence of the abnormality is on the measurement target object side or the window 101 side.

[0057] In a case where it is determined a predetermined number of times that the first received light amount is not included in a first predetermined range and the third received light amount is included in a third predetermined range (third received light amount range), the processor 12 determines that abnormality occurs on the measurement target object side. For example, in a case where the first received light amount changes but the third received light amount does not change, a position of occurrence of abnormality is identified to be on the measurement target object side. In a case where it is determined a predetermined number of times that the first received light amount is not included in the first predetermined range and the third received light amount is not included in the third predetermined range, the processor 12 determines that abnormality occurs on the window 101 side. For example, in a case where the first received light amount and the third received light amount change, a position of occurrence of abnormality is determined to be on the window 101 side. The third predetermined range is obtained in advance by design, experiment, or simulation, and is stored in a memory of the processor 12. The predetermined number of times can be set to any number of times, and may be once or a plurality of times.

[0058] The processor 12 may perform at least one of first abnormality determination of determining whether abnormality occurs on the measurement target object side or the window 101 side based on the first received light amount and the second received light amount, and second abnormality determination of determining whether abnormality occurs on the measurement target object side or the window 101 side based on the first received light amount and the third received light amount. In a case where the processor 12 performs the first abnormality determination and does not perform the second abnormality determination, installation of the emitter 103, the optical receiver 104, and the reflector 105 in the sensor unit 1 can be omitted.

Embodiment

[0059] Hereinafter, an embodiment of the present invention will be described. The signal processor 21 may measure a distance to a measurement target object using an electric signal of an analog wave (analog value). FIG. 4 is a diagram illustrating an example of a time chart of a signal. A time chart (A1) of FIG. 4 illustrates a light emission (instruction) signal input from the drive circuit 24 to the light emitting unit 22. Time charts (A2) and (A3) of FIG. 4 illustrate waveforms of an electric signal of an analog wave output from the light receiving unit 23. The time chart (A2) of FIG. 4 illustrates a waveform of an electric signal when emission light of the light emitting unit 22 is reflected by a reflective object provided inside the sensor 10 and the light receiving unit 23 receives the reflected light. The time chart (A3) of FIG. 4 illustrates a waveform of an electric signal when emission light of the light emitting unit 22 is emitted to the outside of sensor 10, and the light receiving unit 23 receives the reflected light reflected by a measurement target object. As a time at which light is emitted, a value obtained by correcting a rising time of the waveform in (A1) of FIG. 4 using a time at which the waveform in (A2) of FIG. 4 is at a peak is used. As a time at which reflected light is received, a time at which the waveform in (A3) of FIG. 4 is at a peak is used.

[0060] The signal processor 21 may measure a distance to a measurement target object using an electric signal of a rectangular wave (digital value). FIG. 5 is a diagram illustrating an example of a time chart of a signal. A time chart (B1) of FIG. 5 illustrates a light emission (instruction) signal input from the drive circuit 24 to the light emitting unit 22. Time charts (B2) and (B3) of FIG. 5 illustrate waveforms of an electric signal of a rectangular wave output from the light receiving unit 23. The time chart (B2) of FIG. 5 illustrates a waveform of an electric signal when emission light of the light emitting unit 22 is reflected by a reflective object provided inside the sensor 10 and the light receiving unit 23 receives the reflected light. The time chart (B3) of FIG. 5 illustrates a waveform of an electric signal when emission light of the light emitting unit 22 is emitted to the outside of sensor 10, and the light receiving unit 23 receives the reflected light reflected by a measurement target object. In a case where a received light amount is equal to or more than a threshold, the light receiving unit 23 shapes the received light into an electric signal of a rectangular wave and outputs the electric signal. Further, the light receiving unit 23 may output an electric signal corresponding to intensity of the received light, and the electric signal output from the light receiving unit 23 may be input to the signal processor 21. In a case where a value of the electric signal output from the light receiving unit 23 is equal to or more than a threshold, the signal processor 21 shapes the electric signal output from the light receiving unit 23 into a rectangular wave. As a time at which light is emitted, a value obtained by correcting a rising time of the waveform in (B1) of FIG. 5 using a rising time of the waveform in (B2) of FIG. 5 is used. As a time at which reflected light is received, a rising time of the waveform in (B3) of FIG. 5 is used.

[0061] FIG. 6 is a functional block diagram of the processor 12. The processor 12 includes a setting unit 31, a first acquisition unit 32, a second acquisition unit 33, a determination unit 34, a generation unit 35, a display controller 36, and a memory 37 as main functions. Not all constituents of the processor 12 illustrated in FIG. 6 are essential, and the constituents of the processor 12 may be added or deleted as appropriate. For example, the processor 12 may include an output unit that outputs data and information generated by the generation unit 35. Further, the processor 12 may have a function as the signal processor 21.

[0062] The processor 12 is a device (controller) that controls the entire operation of the sensor unit 1 and controls the display device 13. The processor 12 acquires, from the sensor 10, measurement data of a distance to a measurement target object measured by the sensor 10 and measurement data of a received light amount of the light receiving unit 23 measured by the sensor 10. The processor 12 may be configured by a dedicated device or a general-purpose computer. The processor 12 includes hardware resources such as a processor (CPU), a memory, a storage, and a communication I/F. The memory may be a RAM. The storage may be a non-volatile storage device (for example, ROM, flash memory, and the like). A function as each processor (functional unit) of the processor 12 is realized as a program stored in the storage is loaded into a memory and executed by the processor. Note that the configuration of the processor 12 is not limited to the above. For example, all or a part of the functions may be configured by a circuit such as ASIC or FPGA, or all or a part of the functions may be executed by a cloud server or another device.

[0063] The setting unit 31 performs various settings. The first acquisition unit 32 acquires the first received light amount. The second acquisition unit 33 acquires at least one of the second received light amount and the third received light amount. The determination unit 34 determines whether abnormality occurs on the measurement target object side or the window 101 side based on the first received light amount and at least one of the second received light amount and the third received light amount.

[0064] The first acquisition unit 32 may acquire the first received light amount in a plurality of directions. The second acquisition unit 33 may acquire the second received light amount in a plurality of directions. The determination unit 34 may determine whether abnormality occurs on the measurement target object side or the window 101 side based on the first received light amount in a plurality of directions and the second received light amount in a plurality of directions. By the above, it is possible to identify a position of a cause of occurrence of abnormality on the basis of the first received light amount and the second received light amount in a plurality of directions.

[0065] The second acquisition unit 33 may acquire the third received light amount in a plurality of directions. With a plurality of the emitters 103, a plurality of the optical receivers 104, and a plurality of the reflectors 105 arranged along an outer periphery of the window 101, the second acquisition unit 33 can acquire the third received light amount in a plurality of directions. The determination unit 34 may determine whether abnormality occurs on the measurement target object side or the window 101 side based on the first received light amount in a plurality of directions and the third received light amount in a plurality of directions.

[0066] In a case where the determination unit 34 determines that abnormality occurs on the measurement target object side, the generation unit 35 generates information (hereinafter referred to as target abnormality information) on the abnormality on the measurement target object side. The target abnormality information may include at least one of (1) information indicating a possibility that an attachable matter is attached to a target, (2) information prompting the user to check a surface of the target, and (3) information prompting the user to clean the surface of the target. The target abnormality information may include information regarding fluctuation of the first received light amount in addition to the information of (1) to (3). The information regarding fluctuation in the first received light amount is, for example, information indicating that the first received light amount increases or information indicating that the first received light amount decreases.

[0067] In a case where the determination unit 34 determines that abnormality occurs in the window 101, the generation unit 35 generates information regarding abnormality on the window 101 side (hereinafter referred to as window abnormality information). The window abnormality information may include at least one of (4) information indicating a possibility that an attachable matter is attached to the window 101, (5) information prompting the user to check a surface of the window 101, and (6) information prompting the user to clean the surface of the window 101. The window abnormality information may include information regarding fluctuation in the first received light amount and information regarding fluctuation in the second received light amount in addition to the information of (4) to (6). The information regarding fluctuation in the second received light amount is, for example, information indicating that the second received light amount increases or information indicating that the second received light amount decreases. The window abnormality information may include information regarding fluctuation in the first received light amount and information regarding fluctuation in the third received light amount in addition to the information of (4) to (6). The information regarding fluctuation in the third received light amount is, for example, information indicating that the third received light amount increases or information indicating that the third received light amount decreases.

[0068] The display controller 36 controls the display device 13 on the basis of information generated by the generation unit 35. The display controller 36 controls the display device 13 on the basis of the target abnormality information generated by the generation unit 35, so that the display device 13 displays the target abnormality information. By the user visually recognizing the target abnormality information displayed on the display device 13, the user can grasp that a cause of occurrence of abnormality is on the measurement target object side, and can identify a position of the cause of the occurrence of the abnormality.

[0069] The display controller 36 controls the display device 13 on the basis of the window abnormality information generated by the generation unit 35, so that the display device 13 displays the window abnormality information. By the user visually recognizing the window abnormality information displayed on the display device 13, the user can grasp that a cause of occurrence of abnormality is on the window 101 side, and can identify a position of the cause of the occurrence of the abnormality.

[0070] The memory 37 stores various types of data and information. The memory 37 may include a RAM, a non-volatile storage device (for example, ROM, flash memory, and the like), and the like.

[0071] The display device 13 is a device that displays various types of data and information. The display device 13 is, for example, a liquid crystal display, an organic electro luminescence (EL) display, an indicating lamp, or the like. Further, the sensor unit 1 may include an input device such as an operation button and a touch panel. The touch panel may be integrated with the display device 13. The display device 13 may have at least one of a display having a screen for displaying data and information and an indicating lamp for displaying information by changing a glimmering pattern or a blinking pattern.

[0072] FIG. 7 is a diagram illustrating an example of installation of the sensor unit 1. In the example illustrated in FIG. 7, the sensor unit 1 is provided in a frame 200, and a monitoring area 201 is set inside the frame 200. The monitoring area 201 is an area set using each predetermined point of the frame 200 as a reference point. The sensor unit 1 constantly monitors the monitoring area 201. When a person or an object enters the monitoring area 201, the sensor unit 1 outputs a stop signal to an external device (external equipment). The external device is, for example, a device such as a robot or a press machine, but is not limited to these. Further, as illustrated in FIG. 8, there is a case where positional displacement of the frame 200 occurs due to inclination of the frame 200, and a gap 202 is generated between the frame 200 and the monitoring area 201. In a case where a reference point monitoring function is enabled, a stop signal is output from the sensor unit 1 to an external device. When an external device suddenly stops due to generation of the gap 202 between the frame 200 and the monitoring area 201, work is interrupted and work efficiency is lowered.

[0073] In view of the above, in the sensor unit 1, the processor 12 may detect positional displacement of a measurement target object, and the display device 13 may display the positional displacement of the measurement target object, so that the user can grasp the positional displacement of the measurement target object before an external device stops. Hereinafter, an example of detecting positional displacement of a measurement target object will be described with reference to FIGS. 9 to 11.

[0074] FIGS. 9 to 11 are schematic diagrams when the sensor unit 1 is viewed from the side surface side. The determination unit 34 performs first determination to determine whether or not a distance to a measurement target object is included in a first distance range from a first predetermined distance to a second predetermined distance longer than the first predetermined distance. In FIGS. 9 to 11, a distance (hereinafter referred to as distance L1) from the position of the sensor 10 to a predetermined position (1) is an example of the first predetermined distance. In FIGS. 9 to 11, a distance (hereinafter referred to as distance L2) from the position of the sensor 10 to a predetermined position (2) is an example of the second predetermined distance. In FIGS. 9 to 11, a range (A) from the distance L1 to the distance L2 is an example of the first distance range. The determination unit 34 determines whether or not a distance to the frame 200 is included in the range (A) from the distance L1 to the distance L2. That is, the determination unit 34 determines whether or not the position of the frame 200 is included in the range (A) from the predetermined position (1) to the predetermined position (2). The position of the frame 200 is the position of an object to be measured by the sensor unit 1.

[0075] Furthermore, the determination unit 34 performs second determination to determine whether or not a distance to a measurement target object is included in a second distance range from a third predetermined distance to a fourth predetermined distance longer than the third predetermined distance. In FIGS. 9 to 11, a distance (hereinafter referred to as distance L3) from the position of the sensor 10 to a predetermined position (3) is an example of the third predetermined distance. In FIGS. 9 to 11, a distance (hereinafter referred to as distance L4) from the position of the sensor 10 to a predetermined position (4) is an example of the fourth predetermined distance. In FIGS. 9 to 11, a range (B) from the distance L3 to the distance L4 is an example of the second distance range. The determination unit 34 determines whether or not a distance to the frame 200 is included in the range (B) from the distance L3 to the distance L4. That is, the determination unit 34 determines whether or not the position of the frame 200 is included in the range (B) from the predetermined position (3) to the predetermined position (4).

[0076] The determination unit 34 performs at least one of the first determination and the second determination. In a case where a distance to a measurement target object is determined a predetermined number of times to be included in the first distance range or in a case where the distance to the measurement target object is determined a predetermined number of times to be included in the second distance range, the determination unit 34 generates information regarding positional displacement of the object. The predetermined number of times can be set to any number of times, and may be once or a plurality of times.

[0077] In FIG. 10, inclination of the frame 200 causes positional displacement of the frame 200, and the position of the frame 200 is included in the range (A) from the predetermined position (1) to the predetermined position (2). For this reason, the distance to the frame 200 is determined to be included in the range (A) from the distance L1 to the distance L2, and the generation unit 35 generates information regarding positional displacement of a measurement target object.

[0078] In FIG. 11, as the frame 200 moves, positional displacement of the frame 200 occurs, and the position of the frame 200 is included in the range (B) from the predetermined position (3) to the predetermined position (4). For this reason, the distance to the frame 200 is determined to be included in the range (B) from the distance L3 to the distance L4, and the generation unit 35 generates information regarding positional displacement of a measurement target object.

[0079] The display controller 36 controls the display device 13 on the basis of information regarding positional displacement of a measurement target object generated by the generation unit 35, so that the display device 13 displays the information regarding the positional displacement of the measurement target object. The information regarding positional displacement of a measurement target object may include information indicating that the position of a measurement target object is displaced. The information regarding positional displacement of a measurement target object may include information prompting the user to check an installation state of the measurement target object. When the user visually recognizes the information regarding positional displacement of a measurement target object displayed on the display device 13, the user can grasp the positional displacement of the measurement target object before an external device stops. As described above, according to the sensor unit 1, it is possible to grasp positional displacement of a measurement target object before an external device stops due to the positional displacement of the measurement target object.

[0080] The determination unit 34 performs third determination to determine whether or not a distance to an object is included in a third distance range from the second predetermined distance to the third predetermined distance. In FIGS. 9 to 11, a range (C) from the distance L2 to the distance L3 is an example of the third distance range. The determination unit 34 determines whether or not a distance to the frame 200 is included in the range (C) from the distance L2 to the distance L3. That is, the determination unit 34 determines whether or not the position of the frame 200 is included in the range (C) from the predetermined position (2) to the predetermined position (3). In a case where a distance to an object is determined a predetermined number of times to be included in the third distance range, the determination unit 34 does not generate the information regarding positional displacement of an object. The predetermined number of times can be set to any number of times, and may be once or a plurality of times.

[0081] Further, the determination unit 34 performs at least one of fourth determination of determining whether or not a distance to a measurement target object is shorter than the first predetermined distance and fifth determination of determining whether or not the distance to the measurement target object is longer than the fourth predetermined distance. In a case where a distance to a measurement target object is determined a predetermined number of times to be shorter than the first predetermined distance or in a case where the distance to the measurement target object is determined a predetermined number of times to be longer than the fourth predetermined distance, the generation unit 35 generates a stop signal for stopping an external device and sends the stop signal to the external device. The predetermined number of times can be set to any number of times, and may be once or a plurality of times. In a case where a distance to a measurement target object is shorter than the first predetermined distance or in a case where a distance to a measurement target object is longer than the fourth predetermined distance, since positional displacement of the measurement target object exceeds an allowable range, the generation unit 35 sends a stop signal to an external device. As described above, in a case where positional displacement of a measurement target object exceeds an allowable range, an external device can be stopped.

[0082] A setting tool (software program) of the sensor unit 1 is installed in a general personal computer, and the user can set an allowable range to the sensor unit 1 using the setting tool. As described above, the sensor 10 can measure a plurality of directions. A distance to a measurement target object differs for each of a plurality of directions. For this reason, the determination unit 34 compares a distance to a measurement target object with the first predetermined distance, the second predetermined distance, the third predetermined distance, and the fourth predetermined distance set for each of a plurality of directions.

[0083] FIG. 12 is a flowchart illustrating an example of setting processing of reference point monitoring. For example, in a case where the sensor unit 1 is arranged for the first time or in a case where arrangement of the sensor unit 1 is changed, the setting processing is performed. Further, the setting processing of the reference point monitoring is performed in a state where a surface of a measurement target object and a surface of the window 101 are cleaned. In S1, a predetermined scan angle is set, and the light emitting unit 22 emits (projects) light. In S2, the light receiving unit 23 receives light reflected by a measurement target object and light reflected by the window 101. In S3, the signal processor 21 calculates a distance (hereinafter referred to as distance R) to the measurement target object and stores the distance R in the memory 35. In S4, the sensor 10 measures a received light amount (hereinafter referred to as received light amount Ct) of light reflected by the measurement target object, and the setting unit 31 stores the received light amount Ct measured by the sensor 10 in the memory 35. Further, in S4, the sensor 10 measures a received light amount (hereinafter referred to as received light amount Cw) of light reflected by the window 101, and the setting unit 31 stores the received light amount Cw measured by the sensor 10 in the memory 35.

[0084] In S5, the setting unit 31 determines whether the calculation processing and the storing processing for the distance R and the measurement processing and the storing processing for the received light amounts Ct and Cw are completed for all scan angles. In a case where each piece of the processing is not completed for all scan angles (S5; NO), the processing proceeds to S6, and the setting unit 31 changes the scan angle. As each piece of the processing of S1 to S4 is executed, the sensor 10 can measure a plurality of directions. In S7, the setting unit 31 sets a scan angle at which the reference point monitoring is performed. That is, the setting unit 31 sets a range (area) for detecting fluctuation in a received light amount and positional displacement of the measurement target object.

[0085] In S8, the setting unit 31 sets each threshold for each scan angle at which the reference point monitoring is performed. Specifically, the setting unit 31 sets a threshold (R−A, R+A) of a distance for the reference point monitoring, a threshold (R−B, R+B) of a distance at which a stable monitoring can be performed, a threshold (Ct−Ct′, Ct+Ct′) of a received light amount by which stable monitoring can be performed, and a threshold (Cw−Cw′, Cw+Cw′) for detecting window abnormality. The threshold (R−A, R+A) is a threshold used when whether or not positional displacement of a measurement target object exceeds an allowable range is determined. The threshold (R−B, R+B) is a threshold used to detect positional displacement of a measurement target object. The threshold (R−A) is a value smaller than the threshold (R−B). The threshold (R+A) is a value larger than the threshold (R+B). The threshold (Ct−Ct′, Ct+Ct′) is a threshold used to detect fluctuation in the first received light amount. The threshold (Cw−Cw′, Cw+Cw′) is a threshold used to detect fluctuation in the second received light amount.

[0086] The threshold (R−A, R+A), the threshold (R−B, R+B), the threshold (Ct−Ct′, Ct+Ct′), and the threshold (Cw−Cw′, Cw+Cw′) may be obtained by design, experiment, or simulation. A method of setting each value of (A), (B), (Ct′), and (Cw′) in the threshold (R−A, R+A), the threshold (R−B, R+B), the threshold (Ct−Ct′, Ct+Ct′), and the threshold (Cw−Cw′, Cw+Cw′) is not limited. Each value of (A), (B), (Ct′), and (Cw′) in each threshold may be, for example, a constant or may vary depending on an algorithm. In addition, another threshold (for example, a lower limit Ab and an upper limit At) may be further set with respect to an upper limit and a lower limit of the threshold (R−A, R+A), the threshold (R−B, R+B), the threshold (Ct−Ct′, Ct+Ct′), and the threshold (Cw−Cw′, Cw+Cw′).

[0087] FIG. 13 is a flowchart illustrating an example of reference point monitoring processing. One cycle is started, a predetermined scan angle is set in S11, and the light emitting unit 22 emits (projects) light. In S12, the light receiving unit 23 receives light reflected by a measurement target object. In S13, the signal processor 21 calculates a distance to the measurement target object (hereinafter referred to as distance r). In S14, the sensor 10 measures a received light amount reflected by the measurement target object, that is, the first received light amount (hereinafter, also referred to as received light amount ct). The first acquisition unit 32 acquires measurement data of the first received light amount from the sensor 10. Further, in S14, the sensor 10 measures a received light amount reflected by the window 101, that is, the second received light amount (hereinafter, also referred to as received light amount cw). The second acquisition unit 33 acquires measurement data of the second received light amount from the sensor 10.

[0088] In S15, the determination unit 34 determines whether or not the distance r is equal to or more than the threshold (R-A) and equal to or less than the threshold (R+A). In a case where the distance r is smaller than the threshold (R−A) or in a case where the distance r is larger than the threshold (R+A) (S15; NO), the processing proceeds to S16. The determination unit 34 may also perform at least one of determination as to whether or not the distance r is smaller than the threshold (R−A) and determination as to whether or not the distance r is larger than the threshold (R+A).

[0089] In S16, the generation unit 35 generates and outputs a stop signal for stopping an external device. The stop signal is sent to the external device, and the external device receives the stop signal, so that the external device stops. The generation unit 35 may send a stop signal to an external device via an output signal switching device (OSSD) wired and connected to the sensor unit 1. The OSSD is a device for outputting a safety control signal indicating one of an on state and an off state. The generation unit 35 may transmit a stop signal to an external device by wired communication (for example, EtherNet (registered trademark) communication) or wireless communication.

[0090] On the other hand, in a case where the distance r is equal to or more than the threshold (R−A) and the distance r is equal to or less than the threshold (R+A) (S15; YES), the processing proceeds to S17. In S17, the determination unit 34 determines whether or not the distance r is larger than the threshold (R−B) and the distance r is smaller than the threshold (R+B). In a case where the distance r is equal to or less than the threshold (R−B), or in a case where the distance r is equal to or more than the threshold (R+B) (S17; NO), the processing proceeds to S18. The determination unit 34 may also perform at least one of determination as to whether or not the distance r is larger than the threshold (R−B) and determination as to whether or not the distance r is smaller than the threshold (R+B). In a case where the distance r is equal to or more than the threshold (R−A) and the distance r is equal to or less than the threshold (R−B), the determination unit 34 determines that the distance r is included in the first distance range. Further, in a case where the distance r is equal to or more than the threshold (R+B) and the distance r is equal to or less than the threshold (R+A), the determination unit 34 determines that the distance r is included in the second distance range.

[0091] In S18, the generation unit 35 generates information regarding positional displacement of a measurement target object. The display device 13 displays information regarding positional displacement of a measurement target object. The information regarding positional displacement of a measurement target object may include at least one of a letter, a number, a symbol, a character string, a number string, a pictogram, a graph, and an image. For example, in a case where a number, a symbol, or the like is displayed on the display device 13 as the information regarding positional displacement of a measurement target object, the user can grasp that the position of the measurement target object is displaced by checking using a manual or the like. Further, the display device 13 may display the information regarding positional displacement of a measurement target object by a glimmering pattern or a blinking pattern. After the processing of S18 is executed, the processing proceeds to S19.

[0092] On the other hand, in a case where the distance r is larger than the threshold (R−B) and the distance r is smaller than the threshold (R+B) (S17; YES), the processing proceeds to S19. In S19, abnormal position identifying processing is executed. FIG. 14 is a flowchart illustrating an example of the abnormal position identifying processing. In S31, the determination unit 34 determines whether or not the received light amount ct is equal to or more than the threshold (Ct−Ct′) and whether or not the received light amount ct is equal to or less than the threshold (Ct+Ct′).

[0093] In a case where the received light amount ct is equal to or more than the threshold (Ct−Ct′) and the received light amount ct is equal to or less than the threshold (Ct+Ct′) (S31; YES), the determination unit 34 determines that no abnormality occurs on either the object side or the window 101 side. In this case, the abnormal position identifying processing ends, and the processing proceeds to S20.

[0094] On the other hand, in a case where the received light amount ct is smaller than the threshold (Ct−Ct′) or in a case where the received light amount ct is larger than the threshold (Ct+Ct′) (S31; NO), the processing proceeds to S32. In S32, the determination unit 34 determines whether or not the received light amount cw is equal to or more than the threshold (Cw−Cw′) and whether or not the received light amount cw is equal to or less than the threshold (Cw+Cw′).

[0095] In a case where the received light amount cw is equal to or more than the threshold (Cw−Cw′) and the received light amount cw is equal to or less than the threshold (Cw+Cw′) (S32; YES), the determination unit 34 determines that abnormality occurs on the measurement target object side, and the processing proceeds to S33. As described above, in a case where negative determination is made in the processing of S31 and positive determination is made in the processing of S32, the determination unit 34 determines that the first received light amount is not included in the first predetermined range and the second received light amount is included in the second predetermined range. In S33, the generation unit 35 generates the target abnormality information. In S34, the display device 13 displays the target abnormality information. The target abnormality information may include at least one of a letter, a number, a symbol, a character string, a number string, a pictogram, a graph, and an image. Further, the display device 13 may display the target abnormality information by a glimmering pattern or a blinking pattern. After the processing of S34 is executed, the abnormal position identifying processing ends, and the processing proceeds to S20.

[0096] On the other hand, in a case where the received light amount cw is smaller than the threshold (Cw−Cw′), or in a case where the received light amount cw is larger than the threshold (Cw+Cw′) (S32; NO), the determination unit 34 determines that abnormality occurs on the window 101 side, and the processing proceeds to S35. As described above, in a case where negative determination is made in the processing of S31 and negative determination is made in the processing of S32, the determination unit 34 determines that the first received light amount is not included in the first predetermined range and the second received light amount is not included in the second predetermined range. In S35, the generation unit 35 generates the window abnormality information. In S36, the display device 13 displays the window abnormality information. The window abnormality information may include at least one of a letter, a number, a symbol, a character string, a number string, a pictogram, a graph, and an image. Further, the display device 13 may display the window abnormality information by a glimmering pattern or a blinking pattern. After the processing of S36 is executed, the abnormal position identifying processing ends, and the processing proceeds to S20.

[0097] In S20, the determination unit 34 determines whether each piece of the processing of S11 to S15, S17, and S19 is completed for all scan angles. In a case where each piece of the processing is not completed for all scan angles (Step S20; NO), the processing proceeds to S21, and the determination unit 34 changes the scan angle. One cycle ends when each pieces of the processing is completed for all scan angles. A plurality of cycles may be executed at predetermined intervals (regular or irregular intervals).

[0098] By executing each pieces of the processing of S11 to S14 for a plurality of scan angles, the sensor 10 measures a plurality of directions. By executing the processing of S15 for a plurality of scan angles, the determination unit 34 performs at least one of the fourth determination and the fifth determination for a plurality of directions. In a case where a distance to a measurement target object in one of a plurality of directions is determined a predetermined number of times to be shorter than the first predetermined distance or in a case where the distance to the measurement target object in one of a plurality of directions is determined a predetermined number of times to be longer than the fourth predetermined distance, the generation unit 35 generates a stop signal for stopping an external device and sends the stop signal to the external device. By the above, in a case where positional displacement of a measurement target object in one of a plurality of directions exceeds an allowable range, an external device can be stopped.

[0099] By executing each piece of the processing of S15 and S17 for a plurality of scan angles, the determination unit 34 performs at least one of the first determination and the second determination for a plurality of directions. In a case where the distance r in one of a plurality of directions is determined a predetermined number of times to be included in the first distance range or in a case where the distance r in one of a plurality of directions is determined a predetermined number of times to be included in the second distance range, the generation unit 35 generates information regarding positional displacement of a measurement target object. The user can grasp the positional displacement of the measurement target object in one of a plurality of directions.

[0100] As the processing of S14 is executed for a plurality of scan angles, the first acquisition unit 32 acquires measurement data of the first received light amount in a plurality of directions from the sensor 10, and the second acquisition unit 33 acquires measurement data of the second received light amount in a plurality of directions from the sensor 10. As the processing of S19 (abnormal position identifying processing) is executed for a plurality of scan angles, the determination unit 34 determines whether abnormality occurs on the object side or the window 101 side on the basis of the first received light amounts in a plurality of directions and the second received light amounts in a plurality of directions.

[0101] At least one of the determination unit 34 and the generation unit 35 may have a counter function. At least one of the determination unit 34 and the generation unit 35 may count the number of times of negative determination (NO determination) in each piece of the processing of S15, S17, and S32. At least one of the determination unit 34 and the generation unit 35 may count the number of times of positive determination (YES determination) in the processing of S32.

[0102] A first processing example using the counting function will be described. At least one of the determination unit 34 and the generation unit 35 counts the number of times of negative determination in one cycle. In the processing of S15, even if negative determination is made, the processing proceeds to S17 without proceeding to S16. In a case where negative determination is made in the processing of S15 for a plurality of consecutive scan angles in one cycle, the generation unit 35 generates and outputs a stop signal. In a case where the distance r in at least two of a plurality of directions is determined a predetermined number of times to be shorter than the first predetermined distance, the generation unit 35 may generate a stop signal and transmit the stop signal to an external device. In a case where the distance r in at least two of a plurality of directions is determined a predetermined number of times to be longer than the fourth predetermined distance, the generation unit 35 may generate a stop signal and transmit the stop signal to an external device. By the above, in a case where positional displacement of a measurement target object in at least two of a plurality of directions exceeds an allowable range, an external device can be stopped.

[0103] Further, in the processing of S17, even if negative determination is made, the processing proceeds to S19 without proceeding to S18. In a case where negative determination is made in the processing of S17 for a plurality of consecutive scan angles in one cycle, the processing proceeds to S18, and the generation unit 35 generates information regarding positional displacement of a measurement target object. In a case where the distance r in at least two of a plurality of directions is determined a predetermined number of times to be included in the first distance range or in a case where the distance r in at least two of a plurality of directions is determined a predetermined number of times to be included in the second distance range, the generation unit 35 may generate information regarding positional displacement of a measurement target object. The user can grasp the positional displacement of the measurement target object in at least two of a plurality of directions.

[0104] Further, in the processing of S32, even if positive determination is made, the processing proceeds to S20 without proceeding to S33. In a case where positive determination is made in the processing of S32 for a plurality of consecutive scan angles in one cycle, the processing proceeds to S33, and the generation unit 35 generates the target abnormality information. In a case where it is determined a predetermined number of times that the first received light amount in at least two of a plurality of directions is not included in the first predetermined range and the second received light amount in the at least two directions is included in the second predetermined range, the determination unit 34 may determine that abnormality occurs on the measurement target object side. By the above, for example, in a case where the first received light amount in at least two of a plurality of directions changes but the second received light amount in the at least two directions does not change, a position of a cause of occurrence of abnormality is identified to be on the measurement target object side.

[0105] Further, in the processing of S32, even if negative determination is made, the processing proceeds to S20 without proceeding to S33. In a case where negative determination is made in the processing of S32 for a plurality of consecutive scan angles in one cycle, the processing proceeds to S33, and the generation unit 35 generates the window abnormality information. In a case where it is determined a predetermined number of times that the first received light amount in at least two of a plurality of directions is not included in the first predetermined range and the second received light amount in the at least two directions is not included in the second predetermined range, the determination unit 34 may determine that abnormality occurs on the window 101 side. By the above, for example, in a case where the first received light amount and the second received light amount in at least two of a plurality of directions change, a position of a cause of occurrence of abnormality is identified to be on the window 101 side.

[0106] A second processing example using the counting function will be described. At least one of the determination unit 34 and the generation unit 35 counts the number of times of negative determination for the same scan angle in a plurality of cycles. In the processing of S15, even if negative determination is made, the processing proceeds to S17 without proceeding to S16. In a case where negative determination is made in the processing of S15 for the same scan angle over two or more cycles, the generation unit 35 generates and outputs a stop signal. In a case where the distance r in one of a plurality of directions is determined two times or more to be shorter than the first predetermined distance, the generation unit 35 may generate a stop signal and transmit the stop signal to an external device. In a case where the distance r in one of a plurality of directions is determined two times or more to be longer than the fourth predetermined distance, the generation unit 35 may generate a stop signal and transmit the stop signal to an external device.

[0107] Further, in the processing of S17, even if negative determination is made, the processing proceeds to S19 without proceeding to S18. In a case where negative determination is made in the processing of S17 for the same scan angle over two or more cycles, the processing proceeds to S18, and the generation unit 35 generates information regarding positional displacement of a measurement target object. As described above, in a case where the distance r in one of a plurality of directions is determined two or more times to be included in the first distance range or in a case where the distance r in one of a plurality of directions is determined two or more times to be included in the second distance range, the generation unit 35 may generate information regarding positional displacement of a measurement target object.

[0108] Further, in the processing of S32, even if positive determination is made, the processing proceeds to S20 without proceeding to S33. In a case where positive determination is made in the processing of S32 for the same scan angle over two or more cycles, the processing proceeds to S33, and the generation unit 35 generates the target abnormality information. As described above, in a case where it is determined two times or more that the first received light amount in one of a plurality of directions is not included in the first predetermined range and the second received light amount in the direction is included in the second predetermined range, the determination unit 34 may determine that abnormality occurs on the measurement target object side. By the above, for example, in a case where the first received light amount in one of a plurality of directions changes but the second received light amount in the direction does not change, a position of a cause of occurrence of abnormality is identified to be on the measurement target object side.

[0109] Further, in the processing of S32, even if negative determination is made, the processing proceeds to S20 without proceeding to S33. In a case where negative determination is made in the processing of S32 for the same scan angle over two or more cycles, the processing proceeds to S33, and the generation unit 35 generates the window abnormality information. As described above, in a case where it is determined two times or more that the first received light amount in one of a plurality of directions is not included in the first predetermined range and the second received light amount in the direction is not included in the second predetermined range, the determination unit 34 may determine that abnormality occurs on the window 101 side. By the above, for example, in a case where the first received light amount and the second received light amount in one of a plurality of directions change, a position of a cause of occurrence of abnormality is identified to be on the window 101 side.

[0110] Each piece of the processing illustrated in FIGS. 12 to 14 may be applied to processing of determining whether abnormality occurs on the object side or the window 101 side based on the first received light amount and the third received light amount. In this case, in S14, the optical receiver 104 or a control circuit measures a received light amount of light reflected by the window 101, that is, the third received light amount. The second acquisition unit 33 acquires measurement data of the third received light amount from the optical receiver 104 or a control circuit. Note that it is not necessary to determine whether abnormality occurs on the object side or the window 101 side for all scan angles. Whether abnormality occurs on the object side or the window 101 side only needs to be determined for a scan angle corresponding to a position where a plurality of the optical receivers 104 are installed. In the process illustrated in FIGS. 13 and 14, the “second received light amount” is replaced with the “third received light amount”, and the “second predetermined range” is replaced with the “third predetermined range”.

[0111] The generation unit 35 may send at least one of the information regarding positional displacement of a measurement target object, the target abnormality information, and the window abnormality information to an external display device by wired communication or wireless communication. The external display device is a display separate from the sensor unit 1. The external display device is, for example, a liquid crystal display, an organic EL display, or the like. The external display device may be provided in an information processor such as a personal computer, a tablet, or a smartphone.

[0112] Note that there is a case where an attachable matter adheres to a surface of a measurement target object, and an attachable matter adheres to a surface of the window 101. In such a case, first, the sensor unit 1 may notify the user that abnormality occurs on the window 101 side. After cleaning of the surface of the window 101 is completed, the sensor unit 1 may notify the user that abnormality occurs on the measurement target object side.

[0113] The information regarding positional displacement of a measurement target object may include an outer shape of the measurement target object and a position where the positional displacement of the measurement target object occurs. FIG. 15 is a diagram illustrating an example of a screen of the display device 13. For example, as illustrated in FIG. 15, a position where positional displacement of the frame 200 occurs may be highlighted, and an outer shape of the frame 200 and the position where the positional displacement of the frame 200 occurs may be displayed on a screen of the display device 13. In the example illustrated in FIG. 15, information indicating that a position of a target (the frame 200) is displaced is displayed on the screen of the display device 13.

[0114] The target abnormality information may include an outer shape of a measurement target object and a position where abnormality occurs on the measurement target object side. FIG. 16 is a diagram illustrating an example of a screen of the display device 13. For example, as illustrated in FIG. 16, a position where abnormality occurs on the frame 200 side may be highlighted, and an outer shape of the frame 200 and the position where the abnormality occurs on the frame 200 side may be displayed on a screen of the display device 13. In the example illustrated in FIG. 16, information indicating that a received light amount on the target (frame 200) side changes and information prompting cleaning of a surface of the target (frame 200) are displayed on a screen of the display device 13.

[0115] Further, the user may set a stop area and a warning area on a screen of an external display device using a setting tool. FIG. 17 is a diagram illustrating an example of setting of a stop area and a warning area. FIG. 17 illustrates an outer shape of the frame 200, a stop area, and a warning area. The user sets a range of a stop area and a range of a warning area using the setting tool. The range of a warning area may be an allowable range. The user may set the threshold (R−A, R+A) based on a stop area, and may set the threshold (R−B, R+B) based on a warning area.

Others

[0116] The above embodiment merely exemplarily describes the configuration example of the present invention. The present invention is not limited to the specific aspect described above, and various variations can be made within the scope of the technical idea. For example, the sensor unit 1 uses a sensor of a scanner type, but the configuration is not limited to this, and a sensor of a non-scanner type may be used. When a sensor of a non-scanner type is used as the sensor unit 1, a plurality of the sensor units 1 may be provided at an object or in the vicinity of the object.

[0117] Each piece of the processing described above may be regarded as a method executed by a computer. Further, a program for causing a computer to execute each piece of the processing described above may be provided to the computer through a network or from a computer-readable recording medium or the like that holds data non-temporarily.

Supplementary Note 1

[0118] A sensor unit (1) including:

[0119] a sensor (10) including a light emitting unit (22), a light receiving unit (23), a window (101), a signal processor (21), an emitter (103), a reflector (105), and an optical receiver (104), and is configured to measure a distance to an object when light that is emitted from the light emitting unit (22), passes through the window (101), and is reflected by the object passes through the window (101) and is received by the light receiving unit (23);

[0120] a first acquisition unit (32) configured to acquire a first received light amount that is a light amount of light obtained when light reflected by the object is received by the light receiving unit (23);

[0121] a second acquisition unit (33) configured to acquire at least one of a second received light amount that is a light amount of light obtained when light emitted from the light emitting unit (22) and reflected by the window (101) is received by the light receiving unit (23) and a third received light amount that is a light amount of light obtained when light that is emitted from the emitter (103), passes through the window (101), and is reflected by the reflector (105) and light that is emitted from the emitter (103) and reflected by the window (101) are received by the optical receiver (104); and

[0122] a determination unit (34) configured to determine whether abnormality occurs on the object side or the window (101) side based on the first received light amount and at least one of the second received light amount and the third received light amount.

Supplementary Note 2

[0123] A control method of a sensor unit (1) including a light emitting unit (22), a light receiving unit (23), a window (101), an emitter (103), a reflector (105), and an optical receiver (104), the control method including:

[0124] a measuring step of measuring a distance to an object when light that is emitted from the light emitting unit (22), passes through the window (101), and is reflected by the object passes through the window (101) and is received by the light receiving unit (23);

[0125] a first acquiring step of acquiring a first received light amount that is a light amount of light obtained when light reflected by the object is received by the light receiving unit (23);

[0126] a second acquiring step of acquiring at least one of a second received light amount that is a light amount of light obtained when light emitted from the light emitting unit (22) and reflected by the window (101) is received by the light receiving unit (23) and a third received light amount that is a light amount of light obtained when light that is emitted from the emitter (103), passes through the window (101), and is reflected by the reflector (105) and light that is emitted from the emitter (103) and reflected by the window (101) are received by the optical receiver (104); and

[0127] a determining step of determining whether abnormality occurs on the object side or the window (101) side based on the first received light amount and at least one of the second received light amount and the third received light amount.

Supplementary Note 3

[0128] A non-transitory computer readable medium storing a program for causing a processor of a sensor unit (1) including a light emitting unit (22), a light receiving unit (23), a window (101), an emitter (103), a reflector (105), and an optical receiver (104) to execute:

[0129] a measuring step of measuring a distance to an object when light that is emitted from the light emitting unit (22), passes through the window (101), and is reflected by the object passes through the window (101) and is received by the light receiving unit (23);

[0130] a first acquiring step of acquiring a first received light amount that is a light amount of light obtained when light reflected by the object is received by the light receiving unit (23);

[0131] a second acquiring step of acquiring at least one of a second received light amount that is a light amount of light obtained when light emitted from the light emitting unit (22) and reflected by the window (101) is received by the light receiving unit (23) and a third received light amount that is a light amount of light obtained when light that is emitted from the emitter (103), passes through the window (101), and is reflected by the reflector (105) and light that is emitted from the emitter (103) and reflected by the window (101) are received by the optical receiver (104); and

[0132] a determining step of determining whether abnormality occurs on the object side or the window (101) side based on the first received light amount and at least one of the second received light amount and the third received light amount.