INTEGRATED CIRCUIT PACKAGE
20240047407 ยท 2024-02-08
Assignee
Inventors
- Younes BOUTALEB (Grenoble, FR)
- Julien CUZZOCREA (Montbonnot Saint Martin, FR)
- Romain Coffy (Voiron, FR)
Cpc classification
H01L21/78
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/279
ELECTRICITY
H01L2224/279
ELECTRICITY
H01L2224/94
ELECTRICITY
H01L21/78
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L2224/32225
ELECTRICITY
H01L2224/2919
ELECTRICITY
H01L24/94
ELECTRICITY
H01L2224/27848
ELECTRICITY
H01L2224/27436
ELECTRICITY
H01L2224/3003
ELECTRICITY
H01L2224/27848
ELECTRICITY
H01L2224/27436
ELECTRICITY
H01L2224/29078
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00014
ELECTRICITY
H01L2924/00012
ELECTRICITY
H01L2224/92247
ELECTRICITY
H01L21/77
ELECTRICITY
H01L2224/27005
ELECTRICITY
H01L2224/29076
ELECTRICITY
H01L2224/94
ELECTRICITY
H01L21/77
ELECTRICITY
H01L24/73
ELECTRICITY
International classification
Abstract
An integrated circuit package includes at least one electronic chip having a first face fastened onto a first face of a carrier substrate by an adhesive interface. The adhesive interface includes a crown formed of a first adhesive material that is fastened on the periphery of the first face of the electronic chip. The crown defining an internal housing. A second adhesive material, different than the first material, is deposited in the internal housing.
Claims
1. An integrated circuit package, comprising: a carrier substrate; and an electronic integrated circuit chip having a first face fastened onto a first face of the carrier substrate by an adhesive interface; wherein said adhesive interface comprises: a crown formed by a first adhesive material and fastened on a periphery of the first face of the electronic chip and defining an internal housing; and a second adhesive material different than the first adhesive material contained within the internal housing.
2. The package according to claim 1, wherein the first adhesive material is an adhesive film, and wherein the second adhesive material is a glue.
3. The package according to claim 1, wherein the first adhesive material is a filling material, and wherein the second adhesive material is a glue.
4. The package according to claim 1, wherein the second adhesive material covers at least between 80% and 90% of a surface of said first face of the electronic integrated circuit chip.
5. The package according to claim 1, wherein the internal housing exposes at least between 80% and 90% of a surface of said first face of the electronic integrated circuit chip and the second adhesive substantially covers said surface which is exposed.
6. The package according to claim 1, wherein the crown includes at least one lateral opening from the internal housing to an outer surface of the crown.
7. A method for manufacturing at least one integrated circuit package, comprising: a) fastening a crown formed of a first adhesive material on a periphery of a first face of an electronic integrated circuit chip, wherein said crown defines an internal housing; b) disposing a second adhesive material different than the first material within said internal housing, the crown formed of the first adhesive material and the second adhesive material forming an adhesive interface; and c) fastening said first face of the electronic integrated circuit chip onto a first face of a carrier substrate via the adhesive interface.
8. The method according to claim 7, wherein the first adhesive material is an adhesive film, and wherein the second adhesive material is a glue.
9. The method according to claim 7, wherein the first adhesive material is a filling material, and wherein the second adhesive material is a glue.
10. The method according to claim 7, wherein the second adhesive material covers at least between 80% and 90% of a surface of said first face of the electronic integrated circuit chip.
11. The method according to claim 7, wherein the internal housing exposes at least between 80% and 90% of a surface of said first face of the electronic integrated circuit chip and the second adhesive substantially covers the exposed surface.
12. The method according to claim 7, further comprising forming at least one lateral opening in the crown, wherein each lateral opening extends from the internal housing to an outer surface of the crown.
13. A method, comprising: providing a semiconductor wafer; thinning the semiconductor wafer by a first thickness starting from an initial face of the semiconductor wafer so as to obtain a thinned semiconductor wafer having a first face; forming a layer of a first adhesive material on the first face of the thinned semiconductor wafer; locally etching the layer of the first adhesive material so as to form local crowns; forming electronic chips in the wafer, said electronic chips having peripheries respectively in contact with corresponding local crowns; singulating the thinned semiconductor wafer at locations of the local crowns to individualize electronic integrated circuit chips equipped on their first face with a corresponding crown, wherein each corresponding crown defines an internal housing; disposing a second adhesive material in each internal housing; and fastening each electronic integrated circuit chip onto a corresponding carrier substrate via the second adhesive material.
14. The method according to claim 13, wherein the first adhesive material is an adhesive film, and wherein the second adhesive material is a glue.
15. The method according to claim 13, wherein the first adhesive material is a filling material, and wherein the second adhesive material is a glue.
16. The method according to claim 13, wherein the second adhesive material covers at least between 80% and 90% of a surface of said first face of each electronic integrated circuit chip.
17. The method according to claim 13, wherein the internal housing exposes at least between 80% and 90% of a surface of said first face of the electronic integrated circuit chip and the second adhesive substantially covers said surface that is exposed.
18. The method according to claim 13, further comprising forming at least one lateral opening in each corresponding crown, wherein each lateral opening extends from the internal housing to an outer surface of the corresponding crown.
Description
BRIEF DESCRIPTION OF THE DRAWINGS
[0023] Other advantages and features of the invention will appear upon examination of the detailed description of implementations and embodiments, in no way limiting, and of the appended drawings in which:
[0024]
[0025]
[0026]
DETAILED DESCRIPTION
[0027] In
[0028] This package comprises a carrier substrate 3 including a first face or upper face F30 and a second face or lower face F31.
[0029] The lower face F31 is intended to support a ball grid array (not shown here for simplification purposes) intended to be soldered onto a printed circuit board.
[0030] The first face or upper face F30 of the carrier substrate supports an electronic integrated circuit chip 1, a first face, or lower face, F1 of which is fastened onto the first face F30 of the carrier substrate via an adhesive interface 2.
[0031] The chip 1 also includes a second face, or upper face, F2 onto contacts pads of which bonding wires WB connecting these contacts pads to contact pads located on the first face F30 of the carrier substrate 30 are soldered.
[0032] The adhesive interface 2 has a thickness e, for example between 30 microns and 50 microns.
[0033] As illustrated in
[0034] This crown 20 is fastened onto the periphery of the first face F1 of the electronic chip.
[0035] It defines an internal housing 21 containing a second adhesive material 22.
[0036] The first adhesive material 20 and the second adhesive material 22 are different materials.
[0037] For example, the first adhesive material of the crown 20 can be a dielectric film such as the film marketed by the Japanese company Ajinomoto under the acronym ABF (Ajinomoto Build-up Film).
[0038] Alternatively, this first material of the crown 20 can be a filling material known to a person skilled in the art as an underfill material.
[0039] The second material 22 contained in the internal housing 21 can be a conventional glue that preferably covers at least 80 to 90% of the surface of the first face F1 of the electronic chip. In other words, the internal housing 21 defined (delimited) by the crown 20 exposes at least 80 to 90% of the surface of the first face F1 of the electronic chip and the second material 22 substantially covers that surface.
[0040] The crown 20 allows to effectively control the value of the thickness e separating the first face F1 of the chip from the first face F30 of the carrier substrate. [0041] Moreover, this crown traps the glue 22 and avoids it rising along the vertical edges of the chip during the creation of the package.
[0042] Moreover, the volume of glue chosen in such a way that the glue covers at least 80 to 90% of the first face F1 of the chip allows, in combination with the adhesive crown 20, to obtain good adhesion of the chip onto the substrate while minimizing the risk of appearance of cracks under the chip.
[0043] Furthermore, as illustrated in
[0044] Reference is now made more particularly to
[0045] In the step ST30 of
[0046] Then, in step ST31 of
[0047] A thinned wafer WF1 having a first face or lower face F1 is thus obtained.
[0048] Then, in step ST32 of
[0049] For example, in the case in which the first material is a dielectric film, for example an ABF film, this film, originally soft, is deposited on the first face F1 then solidified by thermal annealing at a temperature, for example, between 150 C. and 200 C.
[0050] In the case in which the first material is a filling material, the latter is deposited in a liquid manner, for example via a spin coater, then solidified also by thermal annealing at a temperature between 150 C. and 180 C. for one to two hours.
[0051] Then, in step ST33 of
[0052] Alternatively, in the case of the use of the filling material, it is possible to apply onto the first face F1 local molds having the shapes of the local crowns 20, inject the filling material into the molds, solidify the injected material by baking as mentioned above then remove the molds.
[0053] Then, in step ST34 of
[0054] Then, each internal housing 21 is filled with the appropriate volume of glue 22 and, as illustrated in