B
PERFORMING OPERATIONS; TRANSPORTING
B
PERFORMING OPERATIONS; TRANSPORTING
B81
MICROSTRUCTURAL TECHNOLOGY
B81
MICROSTRUCTURAL TECHNOLOGY
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3/00
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
3/00
Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes