A pressure sensor measures pressure by measuring the deflection of a MEMS membrane using a capacitive read-out method. There are two ways to implement the invention. One involves the use of an integrated Pirani sensor and the other involves the use of an integrated resonator, to function as a reference pressure sensor, for measuring an internal cavity pressure.

Embodiments relate to sensors and more particularly to structures for and methods of forming sensors that are easier to manufacture as integrated components and provide improved deflection of a sensor membrane, lamella or other movable element. In embodiments, a sensor comprises a support structure for a lamella, membrane or other movable element. The support structure comprises a plurality of support elements that hold or carry the movable element. The support elements can comprise individual points or feet-like elements, rather than a conventional interconnected frame, that enable improved motion of the movable element, easier removal of a sacrificial layer between the movable element and substrate during manufacture and a more favorable deflection ratio, among other benefits.

Shaped body, in particular for a pressure sensor, having a membrane and having a supporting section supporting the membrane, the membrane being produced at least in sections from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and having at least in sections a thickness of less than 0.5 mm.

A semiconductor device includes a detector mounted on a base substrate and including a pressure detector to detect pressure, a base portion on the base substrate where the detector is buried, a protruding portion protruding upward from the base portion and including an exposure hole which causes the pressure detector to be exposed upward, and a lid supported by an upper surface of the protruding portion to close the exposure hole. An outer circumferential portion of the lid extends outward from the protruding portion in plan view. The lid includes a slit that is open to an outer side surface and causes the exposure hole to communicate with outside sideward of the semiconductor device.

Pressure sensors, including pressure sensors for automated peritoneal dialysis (APD) systems, and associated systems, devices, and methods are disclosed herein. In one embodiment, an APD system includes a diaphragm positioned over an opening in a disposable set that includes one or more fluid lines. The diaphragm is affixed to the disposable set about a periphery of the opening. The APD system further includes a pressure sensor configured to measure a pressure of fluid flowing through the disposable set. The pressure sensor includes a load cell and an indenter. The indenter can be moveable along an axis such that, when the diaphragm is aligned with the axis, a convexly curved surface of the indenter can be positioned against the diaphragm. When the indenter is contacting the diaphragm, the load cell can measure a force applied to the load cell by the diaphragm and/or by the fluid flowing through the disposable set.

A pressure measurement assembly includes a pressure connector provided with a pressure channel extending longitudinally and a pressure sensitive head. The longitudinal distal side of the pressure sensitive head is recessed inward to form a connecting tube with a sensing cavity facing the distal end, and the longitudinal proximal side of the pressure sensitive head is correspondingly formed with an elastic diaphragm. The longitudinal proximal side of the elastic diaphragm is provided with a pressure measurement circuit, and the proximal end of the connecting tube is sealed and connected to the pressure connector so that the proximal end of the pressure channel is in fluid communication with the sensing cavity. The proximal end of the connecting tube is welded to the pressure connector.

Disclosed are a signal processing assembly for a pressure sensor and a pressure sensor. The signal processing assembly for the pressure sensor includes a horizontal plate, a first flexible plate, a longitudinal plate, a second flexible plate and a first conductive connecting portion connected in sequence. The horizontal plate, the longitudinal plate and the first conductive connecting portion are provided in sequence from near to far; the first conductive connecting portion is electrically connected to the pressure measurement circuit, and the pressure measurement circuit is provided at a horizontal plane located at a distal side of the first conductive connecting portion, so as to well connect the signal processing circuit and the pressure measurement circuit.

A method for manufacturing a pressure sensor having a pressure-sensitive medium. The method includes: providing a pressure sensor having a pressure sensor element, which is arranged in a receiving space of a housing of the pressure sensor; filling the receiving space with a pressure-sensitive medium; applying a second medium, which is immiscible with the pressure-sensitive medium, to a surface of the pressure-sensitive medium; forming a membrane in a boundary region between the pressure-sensitive medium and the second medium by way of a phase-transfer reaction between a first reactant and a second reactant, at least the first reactant or the second reactant being dissolved in the pressure-sensitive medium or in the second medium. A pressure sensor manufactured by the method is also described.

A sealing pin includes a body part and an end part connected to the body part. The body part is insertable into a liquid filling path of a pressure sensor. The body part has a groove on an outer surface. The end part seals a liquid filling port of the liquid filling path. When the sealing pin is inserted into the liquid filling path, an external media pressure applied to a diaphragm of the pressure sensor is transmitted to a pressure detection chip of the pressure sensor through a liquid in the groove.

A sheet-like diaphragm made from a non-metallic material, a main body block made from a non-metallic material, having a diaphragm facing surface facing a main plane of the diaphragm, disposed in a manner that the diaphragm facing surface is covered by the diaphragm, and provided with a fluid outlet and a fluid inlet facing the diaphragm side, a sensor head that has a recess for accommodating pressure transmission liquid, is disposed on a side opposite to the main body block across the diaphragm such that an opening of the recess is closed by the diaphragm, and is configured to detect pressure of fluid flowing between the diaphragm and the diaphragm facing surface by a deformation amount of the diaphragm are included. The fluid inlet and the fluid outlet are provided in a manner separated from the diaphragm further than the diaphragm facing surface.