G01L9/0041

Pressure switch diaphragm sensing element suitable for vacuum applications
11378479 · 2022-07-05 · ·

A pressure switch includes a diaphragm sensing element disposed within a chamber to sealingly separate switching components from a passage. The diaphragm sensing element includes a convolution section that controls movement of a deflection section between neutral and pressurized positions. The pressure switch includes a reverse stop for limiting travel of the deflection section when exposed to negative pressure. A stationary seal element may be disposed at the reverse stop to further limit exposure of the convolution section of the diaphragm sensing element to negative pressure.

Sensor device, in particular a pressure sensor
11300468 · 2022-04-12 · ·

A pressure-sensor device (1) comprises: —a pressure-sensitive component (5, 5a, 6), having a sensor body (5) that includes an elastically deformable membrane part (5a) and at least one detection element (6) suitable for detecting a deformation of the membrane part (5a); —a structure (2, 3) for supporting the pressure-sensitive component (5, 5a, 6), having at least one passageway (15) for a fluid of which a pressure is to be measured, the supporting structure (2, 3) comprising: —a supporting body (2) with respect to which the sensor body (5) is positioned in such a way that its membrane part (5a) is exposed to the fluid exiting the at least one passageway (15), the supporting body (2) having at least one through cavity (14), —at least one compressible element (20, 21), which is configured for compensating possible variations of volume of the fluid and which delimits at least in part at least one respective duct for the fluid (20a, 21a) having an inlet end and an outlet end. The supporting body (2) has a first body portion (2c) comprising a transverse wall (22) of the through cavity (14), defined in which is at least one first passage (23a-23b), and the passageway (15) for the fluid comprises the at least one duct (20a, 21a) of the at least one compressible element (20, 21) and the at least one first passage (23a-23b) of the through wall (22). The at least one first passage (23a-23b) has at least one respective inlet (23a) and at least one respective outlet (23b), at least one of the at least one inlet (23a) and the at least one outlet (23b) being in fluid communication with the at least one duct (20a, 21a). The at least one inlet (23 a) and the at least one outlet (23b) of the at least one first passage (23a-23b) are arranged so as to define a tortuous path for the fluid, the at least one inlet (23 a) and the at least one outlet (23b) being in particular arranged in positions staggered in a lateral direction.

SHAPED BODY AND METHOD FOR PRODUCING A SHAPED BODY
20220082463 · 2022-03-17 ·

Shaped body, in particular for a pressure sensor, having a membrane and having a supporting section supporting the membrane, the membrane being produced at least in sections from a ceramic material by means of additive manufacturing, in particular 3D screen printing, and having at least in sections a thickness of less than 0.5 mm.

PRESSURE SENSOR ASSEMBLY
20220082465 · 2022-03-17 ·

A pressure sensor assembly includes an external housing unit; a sensor unit received within the external housing unit, the external housing unit has an external surface including a mounting surface; a sensing element mounted within the sensor unit and including a pressure-sensing surface; a substrate upon which the mounting surface is mounted; an air passage to enable air to impinge on the sensing element; and a filling passage, separate from the air flow passage, for the introduction of an encapsulation material onto the sensor unit, during assembly. The encapsulation material covers at least a part of the external surface of the sensor unit but does not cover the pressure-sensing surface of the sensing element which remains directly exposed to air within the air passage.

Physical quantity measurement including improved corrosion protection

A physical quantity measuring device includes: a metallic cylindrical case; a sensor module configured to detect a physical quantity; a synthetic-resin joint provided near a first open end of the cylindrical case, the joint being attached with the sensor module and provided with an introduction port for introducing a measurement target fluid; and a cover provided near a second open end of the cylindrical case. The cover includes a locking portion for locking the sensor module. The cylindrical case includes an engagement portion provided near the first open end and engaged with the joint and a crimp portion provided near the second open end, the crimp portion configured to be plastically deformed by crimping. The cover is attached to the cylindrical case by crimping the crimp portion.

PRESSURE SENSOR MANIFOLD AND METHOD OF MANUFACTURING AN ARTICLE
20220100083 · 2022-03-31 ·

A pressure sensor manifold is provided. The pressure sensor manifold includes a fluid inlet, a fluid outlet, and a dome-shape cavity connecting with both the fluid inlet and the fluid outlet. The fluid inlet has a first interior cross-section, and the fluid outlet has a second interior cross-section. The dome-shape cavity has an apex. A line that is tangential to the apex passes through a plurality of points on both the first interior cross-section of the fluid inlet and the second interior cross-section of the fluid outlet.

PRESSURE GAUGE COMPRISING A DEVICE FOR DEFLECTING AN ISOLATION DIAPHRAGM
20220065725 · 2022-03-03 ·

Disclosed is a pressure gauge comprising a pressure sensor and a pressure transmitter connected upstream of the pressure sensor and having an isolation diaphragm enclosing a pressure receiving chamber. A hydraulic pressure transmission path is connected to the pressure receiving chamber and is filled with a pressure transmitting fluid that transmits the pressure acting on the outer side of the isolation diaphragm to the pressure sensor The pressure gauge allows functional impairments of the pressure gauge to be detected early without having to change the pressure acting on the outer side of the isolation diaphragm. The pressure transmitter comprises an electronically activatable deflection device which is designed in such a way that, when activated, it exerts a constant force deflecting the isolation diaphragm, on the isolation diaphragm, or on an element connected to the isolation diaphragm.

Shield structure for pressure sensor, and pressure sensor provided with same

In a pressure sensor, an electric field acting on one end surface of a sensor chip (16) is blocked by a shielding member (17), and an electric field acting on another end surface of the sensor chip (16) is removed through one end portion of a chip mounting member (18), a group of input and output terminals (40ai), and a bonding wire (Wi).

SENSOR AND METHOD FOR MANUFACTURING A SENSOR

A sensor. The sensor include a sensing element for detecting a property and/or a composition of a surrounding medium of the sensor; a transmission medium for transmitting a property and/or a composition of the surroundings medium onto the sensing element, the transmission medium being situated in such a way that the transmission medium is applied to the sensing element; and a cover, which distances the transmission medium from the surrounding medium, the cover being manufactured from a self-healing material, in particular, the cover being designed as a flexible membrane.

METHOD FOR PRODUCING A WAFER CONNECTION

A method for producing a wafer connection between a first and a second wafer. The method includes providing a first and second material for forming a eutectic alloy, providing a first wafer having a receiving structure for a die structure, filling the receiving structure with the first material, providing a second wafer having a die structure, the second material being situated on the die structure, providing a stop structure on the first and/or second wafer, so that when the two wafers are joined, a defined stop is provided, heating the first and second material at least to the eutectic temperature of the eutectic alloy, joining the first and second wafer so that the die structure is at least partly introduced into the receiving structure, the stop structure, the receiving structure, the die structure.