B
PERFORMING OPERATIONS; TRANSPORTING
B
PERFORMING OPERATIONS; TRANSPORTING
B81
MICROSTRUCTURAL TECHNOLOGY
B81
MICROSTRUCTURAL TECHNOLOGY
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
B81B
MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
2203/00
Basic microelectromechanical structures
2203/00
Basic microelectromechanical structures
B81B2203/01
Suspended structures, i.e. structures allowing a movement
B81B2203/01
Suspended structures, i.e. structures allowing a movement