G
PHYSICS
G
PHYSICS
G01
MEASURING; TESTING
G01
MEASURING; TESTING
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
G01N23/00
Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
G01N23/00
Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
G01N23/22
by measuring secondary emission from the material
G01N23/22
by measuring secondary emission from the material
G01N23/225
using electron or ion
G01N23/225
using electron or ion
G01N23/2251
using incident electron beams, e.g. scanning electron microscopy [SEM]
G01N23/2251
using incident electron beams, e.g. scanning electron microscopy [SEM]