H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
H01J2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
H01J2237/248
Components associated with the control of the tube
H01J2237/248
Components associated with the control of the tube
H01J2237/2485
Electric or electronic means
H01J2237/2485
Electric or electronic means
H01J2237/2487
using digital signal processors
H01J2237/2487
using digital signal processors