H
ELECTRICITY
H
ELECTRICITY
H01
ELECTRIC ELEMENTS
H01
ELECTRIC ELEMENTS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
H01J
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
2237/00
Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
H01J2237/32
Processing objects by plasma generation
H01J2237/32
Processing objects by plasma generation
H01J2237/33
characterised by the type of processing
H01J2237/33
characterised by the type of processing
H01J2237/334
Etching
H01J2237/334
Etching
H01J2237/3343
Problems associated with etching
H01J2237/3343
Problems associated with etching
H01J2237/3345
anisotropy
H01J2237/3345
anisotropy