H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/00
Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
H01J37/32009
Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32009
Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
H01J37/32137
controlling of the discharge by modulation of energy
H01J37/32137
controlling of the discharge by modulation of energy