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Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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21/00
Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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H01L21/02
Manufacture or treatment of semiconductor devices or of parts thereof
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H01L21/02104
Forming layers
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H01L21/02365
Forming inorganic semiconducting materials on a substrate
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H01L21/02367
Substrates
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H01L21/0237
Materials
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H01L21/02422
Non-crystalline insulating materials, e.g. glass, polymers
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