H ELECTRICITY
H01 ELECTRIC ELEMENTS
H01L SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
21/00 Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
H01L21/02 Manufacture or treatment of semiconductor devices or of parts thereof
H01L21/04 the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
H01L21/50 Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the groups H01L21/18 - H01L21/326 or H10D48/04 - H10D48/07; e.g. sealing of a cap to a base of a container
H01L21/56 Encapsulations, e.g. encapsulation layers, coatings
H01L21/561 Batch processing