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Patent classifications
H
ELECTRICITY
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H01
ELECTRIC ELEMENTS
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H01L
SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
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29/00
Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof; ; Multistep manufacturing processes therefor;
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H01L29/40
Electrodes; ; Multistep manufacturing processes therefor
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H01L29/43
characterised by the materials of which they are formed
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H01L29/49
Metal-insulator-semiconductor electrodes,; e.g. gates of MOSFET
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H01L29/4916
the conductor material next to the insulator being a silicon layer, e.g. polysilicon doped with boron, phosphorus or nitrogen
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H01L29/4925
with a multiple layer structure, e.g. several silicon layers with different crystal structure or grain arrangement
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