B PERFORMING OPERATIONS; TRANSPORTING
B81 MICROSTRUCTURAL TECHNOLOGY
B81B MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
3/00 Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
B81B3/0018 Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
B81B3/0027 Structures for transforming mechanical energy, e.g. potential energy of a spring into translation, sound into translation